Mass spectroscopy of recoiled ion investigation of electrode segregation effects during the initial stages of SrBi2Ta2O9 film growth

J. Im, A. R. Krauss, O. Auciello, D. M. Gruen, Robert P. H. Chang

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Citations (Scopus)

Abstract

The thermodynamic stability of Pt/Ti/SiO2/Si, Pt/TiO2/SiO2/Si, Pt/Ta/SiO2/Si, Ir/SiO2/Si, and RuO2/SiO2/Si electrode layers has been studied using mass spectroscopy of recoiled ions (MSRI), a new technique which provides monolayer-specific in situ surface analysis under conditions of modest oxygen partial pressures required for oxide film growth using sputter-deposition. Results of the initial stages of growth of SrBi2Ta2O9 films on the various substrates listed above are presented also. It is found that the initial growth of SrBi2Ta2O9 films strongly depends on the composition of the bottom electrode surface, on diffusion and segregation processes, and the presence of reactive species on the electrode surface.

Original languageEnglish
Title of host publicationIntegrated Ferroelectrics
Pages223-235
Number of pages13
Volume22
Edition1-4
Publication statusPublished - 1998

Keywords

  • Ferroelectric films
  • Pt/Ti electrodes
  • SrBiTaO

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

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    Im, J., Krauss, A. R., Auciello, O., Gruen, D. M., & Chang, R. P. H. (1998). Mass spectroscopy of recoiled ion investigation of electrode segregation effects during the initial stages of SrBi2Ta2O9 film growth. In Integrated Ferroelectrics (1-4 ed., Vol. 22, pp. 223-235)