Massively Parallel Nanoparticle Synthesis in Anisotropic Nanoreactors

This work reports a massively parallel approach for synthesizing inorganic nanoparticles (Au, Ag, Se, and mixed oxides of Cu, Co, Ni, Ge, and Ta) based upon lithographically generated arrays of square pyramidal nanoholes, which serve as nanoreactors. Particle precursor-containing polymers are spin-coated onto the nanoreactors, which upon dewetting generate a morphology of isolated polymer droplets in each nanoreactor. This dewetting process yields a well-defined and precisely controlled volume of polymer and therefore particle precursor in each nanoreactor. Subsequent stepwise annealing (first at 150 °C and then at 500 °C) yields arrays of monodisperse, site-isolated particles with sub-5 nm position control. By varying the precursor loading of the polymer, particle size can be systematically controlled in the 7-30 nm range. This work not only introduces the concept of merging block copolymer inks with nanohole arrays in the synthesis of nanoparticles but also underscores the value of the nanoreactor shape in controlling resulting particle position.