Materials Analysis with High Energy Ion Beams Part I: Rutherford Backscattering

H. J. Gossmann, Leonard C Feldman

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3 Citations (Scopus)


This article discusses the underlying principles of Rutherford backscattering spectrometry (RBS). Consideration of the theory of the interaction of high energy ions with solids leads to the conclusion that quantitative elemental analysis of the near-surface composition of solids can be performed by RBS. Examples are given.

Original languageEnglish
Pages (from-to)26-29
Number of pages4
JournalMRS Bulletin
Issue number6
Publication statusPublished - 1987


ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

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