Materials Analysis with High Energy Ion Beams Part I: Rutherford Backscattering

H. J. Gossmann, Leonard C Feldman

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

This article discusses the underlying principles of Rutherford backscattering spectrometry (RBS). Consideration of the theory of the interaction of high energy ions with solids leads to the conclusion that quantitative elemental analysis of the near-surface composition of solids can be performed by RBS. Examples are given.

Original languageEnglish
Pages (from-to)26-29
Number of pages4
JournalMRS Bulletin
Volume12
Issue number6
DOIs
Publication statusPublished - 1987

Fingerprint

Rutherford backscattering spectroscopy
Spectrometry
Ion beams
backscattering
ion beams
Surface structure
spectroscopy
quantitative analysis
Ions
energy
Chemical analysis
ions
interactions

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Cite this

Materials Analysis with High Energy Ion Beams Part I : Rutherford Backscattering. / Gossmann, H. J.; Feldman, Leonard C.

In: MRS Bulletin, Vol. 12, No. 6, 1987, p. 26-29.

Research output: Contribution to journalArticle

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