Phase-pure thin films of the YBCO, BSCCO, TBCCO lattice-matched and low dielectric-loss perovskite insulator PrGaO3 have been grown in situ on single-crystal (110) LaA1O3, (001) SrTiG3, and (001) MgO substrates by metalorganic chemical vapor deposition (MOCVD). Films were grown at temperatures between 750 and 800 °C using the volatile metaiorganic /?-diketonate precursors M(dpm)3 (M = Pr, Ga, and dpm = dipivaloylmethanate) As assessed by x-ray diffraction, the films grow epitaxially on LaAlQ3 and SrTiO3 substrates with a high degree of (001) and/or (110) plane orientation parallel to the substrate surface. The films grown on MgO substrates are polycrystalline. Scanning electron microscopy reveals that the MOCVD-derived PrGaO3 films have smooth, featureless surfaces on all three kinds of substrates.
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 1993|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films