Metal-organic chemical vapor deposition of epitaxial Tl2Ba2Ca2Cu3O10-X thin films

Bruce J. Hinds, Jon L. Schindler, Bin Han, Deborah A. Neumayer, Donald Degroot, Tobin J Marks, Carl R. Kannewurf

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Superconducting thin films of Tl2Ba2Ca2Cu3O10-X (TL-2223) have been grown on single crystal (110) LaAlO3 using a two-step process. Ba2Ca2Cu3OX precursor films are deposited via metal-organic chemical vapor deposition (MOCVD) in a horizontal hot walled reactor. The second generation precursors Ba(hfa)2·tet, Ca(hfa)2·tet, and Ca(hfa)2 (hfa = hexafluoroacetylacetonate, tet = tetraglyme) were used as volatile metal sources due to their superior volatility and stability. Tl was introduced into the film via a high temperature post anneal in the presence of a Tl2O3:BaO:CaO:CuO pellet (1:2:2:3 ratio). Low O2 partial pressures were used to reduce the temperature in which the Tl-2223 phase forms and to improve the surface morphology associated with a liquid phase intermediate. Films are highly oriented with the c-axis perpendicular to the substrate and a-b axis epitaxy is seen from x-ray Φ-scans. The best films have a resistively measured Tc of 115K and a magnetically derived Jc of 6×105 A/cm2 (77K, 0 T). Preliminary surface resistance measurements, using parallel plate techniques, give Rs = 0.35 mΩ at 5K (ω=10 GHz).

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsSeshu B. Desu, David B. Beach, Bruce W. Wessels, Suleyman Gokoglu
PublisherPubl by Materials Research Society
Pages273-278
Number of pages6
Volume335
ISBN (Print)1558992340
Publication statusPublished - 1994
EventProceedings of the 1993 Fall Meeting of the Materials Research Society - Boston, MA, USA
Duration: Nov 29 1993Dec 3 1993

Other

OtherProceedings of the 1993 Fall Meeting of the Materials Research Society
CityBoston, MA, USA
Period11/29/9312/3/93

Fingerprint

Organic Chemicals
Organic chemicals
Chemical vapor deposition
Metals
Thin films
Surface resistance
Superconducting films
Epitaxial growth
Partial pressure
Surface morphology
Single crystals
X rays
Temperature
Liquids
Substrates

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Hinds, B. J., Schindler, J. L., Han, B., Neumayer, D. A., Degroot, D., Marks, T. J., & Kannewurf, C. R. (1994). Metal-organic chemical vapor deposition of epitaxial Tl2Ba2Ca2Cu3O10-X thin films. In S. B. Desu, D. B. Beach, B. W. Wessels, & S. Gokoglu (Eds.), Materials Research Society Symposium Proceedings (Vol. 335, pp. 273-278). Publ by Materials Research Society.

Metal-organic chemical vapor deposition of epitaxial Tl2Ba2Ca2Cu3O10-X thin films. / Hinds, Bruce J.; Schindler, Jon L.; Han, Bin; Neumayer, Deborah A.; Degroot, Donald; Marks, Tobin J; Kannewurf, Carl R.

Materials Research Society Symposium Proceedings. ed. / Seshu B. Desu; David B. Beach; Bruce W. Wessels; Suleyman Gokoglu. Vol. 335 Publ by Materials Research Society, 1994. p. 273-278.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hinds, BJ, Schindler, JL, Han, B, Neumayer, DA, Degroot, D, Marks, TJ & Kannewurf, CR 1994, Metal-organic chemical vapor deposition of epitaxial Tl2Ba2Ca2Cu3O10-X thin films. in SB Desu, DB Beach, BW Wessels & S Gokoglu (eds), Materials Research Society Symposium Proceedings. vol. 335, Publ by Materials Research Society, pp. 273-278, Proceedings of the 1993 Fall Meeting of the Materials Research Society, Boston, MA, USA, 11/29/93.
Hinds BJ, Schindler JL, Han B, Neumayer DA, Degroot D, Marks TJ et al. Metal-organic chemical vapor deposition of epitaxial Tl2Ba2Ca2Cu3O10-X thin films. In Desu SB, Beach DB, Wessels BW, Gokoglu S, editors, Materials Research Society Symposium Proceedings. Vol. 335. Publ by Materials Research Society. 1994. p. 273-278
Hinds, Bruce J. ; Schindler, Jon L. ; Han, Bin ; Neumayer, Deborah A. ; Degroot, Donald ; Marks, Tobin J ; Kannewurf, Carl R. / Metal-organic chemical vapor deposition of epitaxial Tl2Ba2Ca2Cu3O10-X thin films. Materials Research Society Symposium Proceedings. editor / Seshu B. Desu ; David B. Beach ; Bruce W. Wessels ; Suleyman Gokoglu. Vol. 335 Publ by Materials Research Society, 1994. pp. 273-278
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