We describe a method to microfabricate a light emitting diode (LED) pixel array based on conjugated electroluminescent polymers sandwiched between ITO and aluminum. The method, based on direct photoablation using a 193 nm excimer laser, maintains intact the properties of the polymers. The technique as described here has already achieved array of 20 μm × 20 μm pixels with enhanced electroluminescence (EL) from pixels. The method can be extended to achieve nanometer sizes using near-field nanolithography. The microfabrication of the LED array requires also the patterning of the ITO and the aluminum electrode. For better performance of the device it is important to map the conductivity of the patterned electrodes. For that purpose we have used a novel mm-wave conductivity microscope which is capable to measure the local conductivity of the patterned film with a spatial resolution of ∼10-30 μm.
|Number of pages||4|
|Publication status||Published - Mar 15 1997|
- Conductivity mapping
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Materials Chemistry
- Polymers and Plastics