Microscale features and surface chemical functionality patterned by electron beam lithography: A novel route to poly(dimethylsiloxane) (PDMS) stamp fabrication

Matthew T. Russell, Liam S.C. Pingree, Mark C. Hersam, Tobin J. Marks

Research output: Contribution to journalArticle

21 Citations (Scopus)

Fingerprint Dive into the research topics of 'Microscale features and surface chemical functionality patterned by electron beam lithography: A novel route to poly(dimethylsiloxane) (PDMS) stamp fabrication'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy