Microwave surface resistance of YBa2Cu3O7-δ thin films deposited by pulsed organometallic beam epitaxy

D. C. DeGroot; T. P. Hogan; C. R. Kannewurf; D. B. Buchholz; R. P.H. Chang; F. Gao; M. Feng; R. A. Nordin

doi:10.1016/0921-4534(94)90543-6

Microwave surface resistance of YBa₂Cu₃O_7-δ thin films deposited by pulsed organometallic beam epitaxy

D. C. DeGroot, T. P. Hogan, C. R. Kannewurf, D. B. Buchholz, R. P.H. Chang, F. Gao, M. Feng, R. A. Nordin

Northwestern University

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

The microwave surface resistance of superconducting YBa₂Cu₃O_7-δ thin films deposited by pulsed organometallic beam epitaxy (POMBE) has been characterized using the parallel plate transmission line resonator method. POMBE is an advanced organometric chemical vapor deposition technique where precursor vapors are precisely metered onto the substrate under computer control. In this study, the POMBE reactor was used to deposit epitaxial films of varying thickness onto LaAlO₃ substrates. The deposition procedure and surface-resistance results for films of varying thicknesses are described. The reduction of surface resistance achieved supports the use of the POMBE technique as a possible method for preparing device-quality high-T_c films and multi-layer structures.

Original language	English
Pages (from-to)	271-277
Number of pages	7
Journal	Physica C: Superconductivity and its applications
Volume	222
Issue number	3-4
DOIs	https://doi.org/10.1016/0921-4534(94)90543-6
Publication status	Published - Mar 20 1994

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

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Microwave surface resistance of YBa₂Cu₃O_7-δ thin films deposited by pulsed organometallic beam epitaxy. / DeGroot, D. C.; Hogan, T. P.; Kannewurf, C. R.; Buchholz, D. B.; Chang, R. P.H.; Gao, F.; Feng, M.; Nordin, R. A.

In: Physica C: Superconductivity and its applications, Vol. 222, No. 3-4, 20.03.1994, p. 271-277.

Research output: Contribution to journal › Article › peer-review

@article{1c81f9d2813847d1aa6c085dfb411c6b,

title = "Microwave surface resistance of YBa2Cu3O7-δ thin films deposited by pulsed organometallic beam epitaxy",

abstract = "The microwave surface resistance of superconducting YBa2Cu3O7-δ thin films deposited by pulsed organometallic beam epitaxy (POMBE) has been characterized using the parallel plate transmission line resonator method. POMBE is an advanced organometric chemical vapor deposition technique where precursor vapors are precisely metered onto the substrate under computer control. In this study, the POMBE reactor was used to deposit epitaxial films of varying thickness onto LaAlO3 substrates. The deposition procedure and surface-resistance results for films of varying thicknesses are described. The reduction of surface resistance achieved supports the use of the POMBE technique as a possible method for preparing device-quality high-Tc films and multi-layer structures.",

author = "DeGroot, {D. C.} and Hogan, {T. P.} and Kannewurf, {C. R.} and Buchholz, {D. B.} and Chang, {R. P.H.} and F. Gao and M. Feng and Nordin, {R. A.}",

year = "1994",

month = mar,

day = "20",

doi = "10.1016/0921-4534(94)90543-6",

language = "English",

volume = "222",

pages = "271--277",

journal = "Physica C: Superconductivity and its Applications",

issn = "0921-4534",

publisher = "Elsevier",

number = "3-4",

}

TY - JOUR

T1 - Microwave surface resistance of YBa2Cu3O7-δ thin films deposited by pulsed organometallic beam epitaxy

AU - DeGroot, D. C.

AU - Hogan, T. P.

AU - Kannewurf, C. R.

AU - Buchholz, D. B.

AU - Chang, R. P.H.

AU - Gao, F.

AU - Feng, M.

AU - Nordin, R. A.

PY - 1994/3/20

Y1 - 1994/3/20

N2 - The microwave surface resistance of superconducting YBa2Cu3O7-δ thin films deposited by pulsed organometallic beam epitaxy (POMBE) has been characterized using the parallel plate transmission line resonator method. POMBE is an advanced organometric chemical vapor deposition technique where precursor vapors are precisely metered onto the substrate under computer control. In this study, the POMBE reactor was used to deposit epitaxial films of varying thickness onto LaAlO3 substrates. The deposition procedure and surface-resistance results for films of varying thicknesses are described. The reduction of surface resistance achieved supports the use of the POMBE technique as a possible method for preparing device-quality high-Tc films and multi-layer structures.

AB - The microwave surface resistance of superconducting YBa2Cu3O7-δ thin films deposited by pulsed organometallic beam epitaxy (POMBE) has been characterized using the parallel plate transmission line resonator method. POMBE is an advanced organometric chemical vapor deposition technique where precursor vapors are precisely metered onto the substrate under computer control. In this study, the POMBE reactor was used to deposit epitaxial films of varying thickness onto LaAlO3 substrates. The deposition procedure and surface-resistance results for films of varying thicknesses are described. The reduction of surface resistance achieved supports the use of the POMBE technique as a possible method for preparing device-quality high-Tc films and multi-layer structures.

UR - http://www.scopus.com/inward/record.url?scp=0028392931&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028392931&partnerID=8YFLogxK

U2 - 10.1016/0921-4534(94)90543-6

DO - 10.1016/0921-4534(94)90543-6

M3 - Article

AN - SCOPUS:0028392931

VL - 222

SP - 271

EP - 277

JO - Physica C: Superconductivity and its Applications

JF - Physica C: Superconductivity and its Applications

SN - 0921-4534

IS - 3-4

ER -