Abstract
The microwave surface resistance of superconducting YBa2Cu3O7-δ thin films deposited by pulsed organometallic beam epitaxy (POMBE) has been characterized using the parallel plate transmission line resonator method. POMBE is an advanced organometric chemical vapor deposition technique where precursor vapors are precisely metered onto the substrate under computer control. In this study, the POMBE reactor was used to deposit epitaxial films of varying thickness onto LaAlO3 substrates. The deposition procedure and surface-resistance results for films of varying thicknesses are described. The reduction of surface resistance achieved supports the use of the POMBE technique as a possible method for preparing device-quality high-Tc films and multi-layer structures.
| Original language | English |
|---|---|
| Pages (from-to) | 271-277 |
| Number of pages | 7 |
| Journal | Physica C: Superconductivity and its Applications |
| Volume | 222 |
| Issue number | 3-4 |
| DOIs | |
| Publication status | Published - Mar 20 1994 |
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ASJC Scopus subject areas
- Condensed Matter Physics
Cite this
Microwave surface resistance of YBa2Cu3O7-δ thin films deposited by pulsed organometallic beam epitaxy. / DeGroot, D. C.; Hogan, T. P.; Kannewurf, C. R.; Buchholz, D. B.; Chang, Robert P. H.; Gao, F.; Feng, M.; Nordin, R. A.
In: Physica C: Superconductivity and its Applications, Vol. 222, No. 3-4, 20.03.1994, p. 271-277.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Microwave surface resistance of YBa2Cu3O7-δ thin films deposited by pulsed organometallic beam epitaxy
AU - DeGroot, D. C.
AU - Hogan, T. P.
AU - Kannewurf, C. R.
AU - Buchholz, D. B.
AU - Chang, Robert P. H.
AU - Gao, F.
AU - Feng, M.
AU - Nordin, R. A.
PY - 1994/3/20
Y1 - 1994/3/20
N2 - The microwave surface resistance of superconducting YBa2Cu3O7-δ thin films deposited by pulsed organometallic beam epitaxy (POMBE) has been characterized using the parallel plate transmission line resonator method. POMBE is an advanced organometric chemical vapor deposition technique where precursor vapors are precisely metered onto the substrate under computer control. In this study, the POMBE reactor was used to deposit epitaxial films of varying thickness onto LaAlO3 substrates. The deposition procedure and surface-resistance results for films of varying thicknesses are described. The reduction of surface resistance achieved supports the use of the POMBE technique as a possible method for preparing device-quality high-Tc films and multi-layer structures.
AB - The microwave surface resistance of superconducting YBa2Cu3O7-δ thin films deposited by pulsed organometallic beam epitaxy (POMBE) has been characterized using the parallel plate transmission line resonator method. POMBE is an advanced organometric chemical vapor deposition technique where precursor vapors are precisely metered onto the substrate under computer control. In this study, the POMBE reactor was used to deposit epitaxial films of varying thickness onto LaAlO3 substrates. The deposition procedure and surface-resistance results for films of varying thicknesses are described. The reduction of surface resistance achieved supports the use of the POMBE technique as a possible method for preparing device-quality high-Tc films and multi-layer structures.
UR - http://www.scopus.com/inward/record.url?scp=0028392931&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0028392931&partnerID=8YFLogxK
U2 - 10.1016/0921-4534(94)90543-6
DO - 10.1016/0921-4534(94)90543-6
M3 - Article
VL - 222
SP - 271
EP - 277
JO - Physica C: Superconductivity and its Applications
JF - Physica C: Superconductivity and its Applications
SN - 0921-4534
IS - 3-4
ER -