MOCVD-derived highly transparent, conductive zinc- and tin-doped indium oxide thin films: Precursor synthesis, metastable phase film growth and characterization, and application as anodes in polymer light-emitting diodes

Jun Ni, He Yan, Anchuang Wang, Yu Yang, Charlotte L. Stern, Andrew W. Metz, Shu Jin, Lian Wang, Tobin J. Marks, John R. Ireland, Carl R. Kannewurf

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135 Citations (Scopus)

Abstract

Four diamine adducts of bis(hexafluoroacetylacetonato)zinc [Zn(hfa) 2·(diamine)] can be synthesized in a single-step reaction. Single crystal X-ray diffraction studies reveal monomeric, six-coordinate structures. The thermal stabilities and vapor phase transport properties of these new complexes are considerably greater than those of conventional solid zinc metal-organic chemical vapor deposition (MOCVD) precursors. One of the complexes in the series, bis(1,1,1,5,5,5-hexafluoro-2,4-pentadionato)-(N, N′-diethylethylenediamine)zinc, is particularly effective in the growth of thin films of the transparent conducting oxide Zn-In-Sn-O (ZITO) because of its superior volatility and low melting point of 64°C. ZITO thin films with In contents ranging from 40 to 70 cation % (a metastable phase) were grown by low-pressure MOCVD. These films exhibit conductivity as high as 2900 S/cm and optical transparency comparable to or greater than that of commercial Sn-doped indium oxide (ITO) films. ZITO films with the nominal composition of ZnIn 2.0Sn1.5Oz were used in fabrication of polymer light-emitting diodes. These devices exhibit light outputs and current efficiencies almost 70% greater than those of ITO-based control devices.

Original languageEnglish
Pages (from-to)5613-5624
Number of pages12
JournalJournal of the American Chemical Society
Volume127
Issue number15
DOIs
Publication statusPublished - Apr 20 2005

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ASJC Scopus subject areas

  • Catalysis
  • Chemistry(all)
  • Biochemistry
  • Colloid and Surface Chemistry

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