MOCVD of epitaxial BaTiO3 films using a liquid barium precursor

Andrew R. Teren, John A. Belot, Nikki L. Edleman, Tobin J Marks, Bruce W. Wessels

Research output: Contribution to journalArticle

27 Citations (Scopus)
Original languageEnglish
Pages (from-to)175-177
Number of pages3
JournalChemical Vapor Deposition
Volume6
Issue number4
Publication statusPublished - Aug 2000

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Electrochemistry
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Teren, A. R., Belot, J. A., Edleman, N. L., Marks, T. J., & Wessels, B. W. (2000). MOCVD of epitaxial BaTiO3 films using a liquid barium precursor. Chemical Vapor Deposition, 6(4), 175-177.