MOCVD of epitaxial BaTiO3 films using a liquid barium precursor

Andrew R. Teren, John A. Belot, Nikki L. Edleman, Tobin J Marks, Bruce W. Wessels

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)
Original languageEnglish
Pages (from-to)175-177
Number of pages3
JournalChemical Vapor Deposition
Issue number4
Publication statusPublished - Aug 2000

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Electrochemistry
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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