Abstract
The glyme adducts of bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionate)barium, Ba(hfac)2·glyme, are frequently employed as precursors in the MOCVD fabrication of HTSC thin films. The physical properties of these precursors can be modified by changing the glyme ligand in the barium complex. In this study, gas phase concentrations of two barium complexes as a function of purge time and bubbler temperature have been examined by in-situ UV spectroscopy. Also presented are the details of a UV spectrophotometric-based feedback control system designed to maintain constant gas phase concentration of 2,2,6,6-tetramethyl-3,5-heptadionate (thd) precursors, Cu(thd)2 and Y(thd)3, during MOCVD growth of mixed metal oxide films.
| Original language | English |
|---|---|
| Pages (from-to) | 69-75 |
| Number of pages | 7 |
| Journal | Unknown Journal |
| Volume | 477 |
| Publication status | Published - 1997 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
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MOCVD precursor delivery monitored and controlled using UV spectroscopy. / Rappoli, Brian J.; DeSisto, William J.; Marks, Tobin J; Belot, John A.
In: Unknown Journal, Vol. 477, 1997, p. 69-75.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - MOCVD precursor delivery monitored and controlled using UV spectroscopy
AU - Rappoli, Brian J.
AU - DeSisto, William J.
AU - Marks, Tobin J
AU - Belot, John A.
PY - 1997
Y1 - 1997
N2 - The glyme adducts of bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionate)barium, Ba(hfac)2·glyme, are frequently employed as precursors in the MOCVD fabrication of HTSC thin films. The physical properties of these precursors can be modified by changing the glyme ligand in the barium complex. In this study, gas phase concentrations of two barium complexes as a function of purge time and bubbler temperature have been examined by in-situ UV spectroscopy. Also presented are the details of a UV spectrophotometric-based feedback control system designed to maintain constant gas phase concentration of 2,2,6,6-tetramethyl-3,5-heptadionate (thd) precursors, Cu(thd)2 and Y(thd)3, during MOCVD growth of mixed metal oxide films.
AB - The glyme adducts of bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionate)barium, Ba(hfac)2·glyme, are frequently employed as precursors in the MOCVD fabrication of HTSC thin films. The physical properties of these precursors can be modified by changing the glyme ligand in the barium complex. In this study, gas phase concentrations of two barium complexes as a function of purge time and bubbler temperature have been examined by in-situ UV spectroscopy. Also presented are the details of a UV spectrophotometric-based feedback control system designed to maintain constant gas phase concentration of 2,2,6,6-tetramethyl-3,5-heptadionate (thd) precursors, Cu(thd)2 and Y(thd)3, during MOCVD growth of mixed metal oxide films.
UR - http://www.scopus.com/inward/record.url?scp=0031346404&partnerID=8YFLogxK
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M3 - Article
VL - 477
SP - 69
EP - 75
JO - Unknown Journal
JF - Unknown Journal
ER -