MOCVD precursor delivery monitored and controlled using UV spectroscopy

Brian J. Rappoli; William J. DeSisto; Tobin J. Marks; John A. Belot

doi:10.1557/proc-474-69

MOCVD precursor delivery monitored and controlled using UV spectroscopy

Brian J. Rappoli, William J. DeSisto, Tobin J. Marks, John A. Belot

Northwestern University

Research output: Contribution to journal › Conference article › peer-review

Abstract

The glyme adducts of bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionate)barium, Ba(hfac)₂·glyme, are frequently employed as precursors in the MOCVD fabrication of HTSC thin films. The physical properties of these precursors can be modified by changing the glyme ligand in the barium complex. In this study, gas phase concentrations of two barium complexes as a function of purge time and bubbler temperature have been examined by in-situ UV spectroscopy. Also presented are the details of a UV spectrophotometric-based feedback control system designed to maintain constant gas phase concentration of 2,2,6,6-tetramethyl-3,5-heptadionate (thd) precursors, Cu(thd)₂ and Y(thd)₃, during MOCVD growth of mixed metal oxide films.

Original language	English
Pages (from-to)	69-75
Number of pages	7
Journal	Materials Research Society Symposium - Proceedings
Volume	477
DOIs	https://doi.org/10.1557/proc-474-69
Publication status	Published - Jan 1 1997
Event	Proceedings of the 1997 MRS Spring Meeting - San Francisco, CA, USA Duration: Mar 31 1997 → Apr 3 1997

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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@article{5550109fe8954e8ab09e20a402112adc,

title = "MOCVD precursor delivery monitored and controlled using UV spectroscopy",

abstract = "The glyme adducts of bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionate)barium, Ba(hfac)2·glyme, are frequently employed as precursors in the MOCVD fabrication of HTSC thin films. The physical properties of these precursors can be modified by changing the glyme ligand in the barium complex. In this study, gas phase concentrations of two barium complexes as a function of purge time and bubbler temperature have been examined by in-situ UV spectroscopy. Also presented are the details of a UV spectrophotometric-based feedback control system designed to maintain constant gas phase concentration of 2,2,6,6-tetramethyl-3,5-heptadionate (thd) precursors, Cu(thd)2 and Y(thd)3, during MOCVD growth of mixed metal oxide films.",

author = "Rappoli, {Brian J.} and DeSisto, {William J.} and Marks, {Tobin J.} and Belot, {John A.}",

year = "1997",

month = jan,

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doi = "10.1557/proc-474-69",

language = "English",

volume = "477",

pages = "69--75",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1997 MRS Spring Meeting ; Conference date: 31-03-1997 Through 03-04-1997",

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TY - JOUR

T1 - MOCVD precursor delivery monitored and controlled using UV spectroscopy

AU - Rappoli, Brian J.

AU - DeSisto, William J.

AU - Marks, Tobin J.

AU - Belot, John A.

PY - 1997/1/1

Y1 - 1997/1/1

N2 - The glyme adducts of bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionate)barium, Ba(hfac)2·glyme, are frequently employed as precursors in the MOCVD fabrication of HTSC thin films. The physical properties of these precursors can be modified by changing the glyme ligand in the barium complex. In this study, gas phase concentrations of two barium complexes as a function of purge time and bubbler temperature have been examined by in-situ UV spectroscopy. Also presented are the details of a UV spectrophotometric-based feedback control system designed to maintain constant gas phase concentration of 2,2,6,6-tetramethyl-3,5-heptadionate (thd) precursors, Cu(thd)2 and Y(thd)3, during MOCVD growth of mixed metal oxide films.

AB - The glyme adducts of bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionate)barium, Ba(hfac)2·glyme, are frequently employed as precursors in the MOCVD fabrication of HTSC thin films. The physical properties of these precursors can be modified by changing the glyme ligand in the barium complex. In this study, gas phase concentrations of two barium complexes as a function of purge time and bubbler temperature have been examined by in-situ UV spectroscopy. Also presented are the details of a UV spectrophotometric-based feedback control system designed to maintain constant gas phase concentration of 2,2,6,6-tetramethyl-3,5-heptadionate (thd) precursors, Cu(thd)2 and Y(thd)3, during MOCVD growth of mixed metal oxide films.

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JF - Materials Research Society Symposium - Proceedings

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T2 - Proceedings of the 1997 MRS Spring Meeting

Y2 - 31 March 1997 through 3 April 1997

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