MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes

Tobin J Marks, J. A. Belot, C. J. Reedy, R. J. McNeely, D. B. Studebaker, D. A. Neumayer, C. L. Stern

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

This contribution presents synthetic, structural and volatility results for a series of new Ba(hfa)2·polyether (hfa= 1,1,1,5,5,5-hexafluoropentane-2,4-dionate) MOCVD precursors. The major emphasis of this study is on the synthesis and characterization of new Ba(hexafluoroacetylacetonate)2·polyether complexes as on well as elucidating relationships between volatility, melting point and molecular architecture using a variety of techniques, including reduced pressure thermogravimetric analysis (TGA). The results provide insights into tuning Ba precursor volatility characteristics based on straightforward modifications of the polyether structure.

Original languageEnglish
Pages (from-to)243-248
Number of pages6
JournalJournal of Alloys and Compounds
Volume251
Issue number1-2
Publication statusPublished - Apr 1997

Fingerprint

Polyethers
Metallorganic chemical vapor deposition
Vapor pressure
Melting point
Thermogravimetric analysis
Tuning
hexafluoroacetylacetonate

Keywords

  • MOCVD
  • TGA

ASJC Scopus subject areas

  • Metals and Alloys

Cite this

MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes. / Marks, Tobin J; Belot, J. A.; Reedy, C. J.; McNeely, R. J.; Studebaker, D. B.; Neumayer, D. A.; Stern, C. L.

In: Journal of Alloys and Compounds, Vol. 251, No. 1-2, 04.1997, p. 243-248.

Research output: Contribution to journalArticle

Marks, Tobin J ; Belot, J. A. ; Reedy, C. J. ; McNeely, R. J. ; Studebaker, D. B. ; Neumayer, D. A. ; Stern, C. L. / MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes. In: Journal of Alloys and Compounds. 1997 ; Vol. 251, No. 1-2. pp. 243-248.
@article{13ad6390b7864fac81e865bd9a545c09,
title = "MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes",
abstract = "This contribution presents synthetic, structural and volatility results for a series of new Ba(hfa)2·polyether (hfa= 1,1,1,5,5,5-hexafluoropentane-2,4-dionate) MOCVD precursors. The major emphasis of this study is on the synthesis and characterization of new Ba(hexafluoroacetylacetonate)2·polyether complexes as on well as elucidating relationships between volatility, melting point and molecular architecture using a variety of techniques, including reduced pressure thermogravimetric analysis (TGA). The results provide insights into tuning Ba precursor volatility characteristics based on straightforward modifications of the polyether structure.",
keywords = "MOCVD, TGA",
author = "Marks, {Tobin J} and Belot, {J. A.} and Reedy, {C. J.} and McNeely, {R. J.} and Studebaker, {D. B.} and Neumayer, {D. A.} and Stern, {C. L.}",
year = "1997",
month = "4",
language = "English",
volume = "251",
pages = "243--248",
journal = "Journal of Alloys and Compounds",
issn = "0925-8388",
publisher = "Elsevier BV",
number = "1-2",

}

TY - JOUR

T1 - MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes

AU - Marks, Tobin J

AU - Belot, J. A.

AU - Reedy, C. J.

AU - McNeely, R. J.

AU - Studebaker, D. B.

AU - Neumayer, D. A.

AU - Stern, C. L.

PY - 1997/4

Y1 - 1997/4

N2 - This contribution presents synthetic, structural and volatility results for a series of new Ba(hfa)2·polyether (hfa= 1,1,1,5,5,5-hexafluoropentane-2,4-dionate) MOCVD precursors. The major emphasis of this study is on the synthesis and characterization of new Ba(hexafluoroacetylacetonate)2·polyether complexes as on well as elucidating relationships between volatility, melting point and molecular architecture using a variety of techniques, including reduced pressure thermogravimetric analysis (TGA). The results provide insights into tuning Ba precursor volatility characteristics based on straightforward modifications of the polyether structure.

AB - This contribution presents synthetic, structural and volatility results for a series of new Ba(hfa)2·polyether (hfa= 1,1,1,5,5,5-hexafluoropentane-2,4-dionate) MOCVD precursors. The major emphasis of this study is on the synthesis and characterization of new Ba(hexafluoroacetylacetonate)2·polyether complexes as on well as elucidating relationships between volatility, melting point and molecular architecture using a variety of techniques, including reduced pressure thermogravimetric analysis (TGA). The results provide insights into tuning Ba precursor volatility characteristics based on straightforward modifications of the polyether structure.

KW - MOCVD

KW - TGA

UR - http://www.scopus.com/inward/record.url?scp=0031123241&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031123241&partnerID=8YFLogxK

M3 - Article

VL - 251

SP - 243

EP - 248

JO - Journal of Alloys and Compounds

JF - Journal of Alloys and Compounds

SN - 0925-8388

IS - 1-2

ER -