This contribution presents synthetic, structural and volatility results for a series of new Ba(hfa)2·polyether (hfa= 1,1,1,5,5,5-hexafluoropentane-2,4-dionate) MOCVD precursors. The major emphasis of this study is on the synthesis and characterization of new Ba(hexafluoroacetylacetonate)2·polyether complexes as on well as elucidating relationships between volatility, melting point and molecular architecture using a variety of techniques, including reduced pressure thermogravimetric analysis (TGA). The results provide insights into tuning Ba precursor volatility characteristics based on straightforward modifications of the polyether structure.
|Number of pages||6|
|Journal||Journal of Alloys and Compounds|
|Publication status||Published - Apr 1997|
ASJC Scopus subject areas
- Metals and Alloys