MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes

Tobin J Marks, J. A. Belot, C. J. Reedy, R. J. McNeely, D. B. Studebaker, D. A. Neumayer, C. L. Stern

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

This contribution presents synthetic, structural and volatility results for a series of new Ba(hfa)2·polyether (hfa= 1,1,1,5,5,5-hexafluoropentane-2,4-dionate) MOCVD precursors. The major emphasis of this study is on the synthesis and characterization of new Ba(hexafluoroacetylacetonate)2·polyether complexes as on well as elucidating relationships between volatility, melting point and molecular architecture using a variety of techniques, including reduced pressure thermogravimetric analysis (TGA). The results provide insights into tuning Ba precursor volatility characteristics based on straightforward modifications of the polyether structure.

Original languageEnglish
Pages (from-to)243-248
Number of pages6
JournalJournal of Alloys and Compounds
Volume251
Issue number1-2
Publication statusPublished - Apr 1997

Keywords

  • MOCVD
  • TGA

ASJC Scopus subject areas

  • Metals and Alloys

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