Molecular control of the threshold voltage of an NMOS inversion layer

Jinman Yang, T. J. Thornton, M. Kozicki, L. De la Garza, John Devens Gust

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We have developed a hybrid molecular-MOSFET structure that is sensitive to the presence of a molecular monolayer attached to its surface. The device is fabricated from a silicon-on-insulator wafer and we use a substrate voltage, Vsub, to invert the buried Si:SiO2 interface. This allows the top surface of the silicon to be free of any insulating layers, apart from a thin native oxide that forms on exposure to air. The buried inversion layer is only a few hundred angstroms away from the exposed surface, and the threshold voltage of the device, Vth, is strongly influenced by the surface potential. A spiropyran monolayer is attached to the surface of the device by means of carboxylic-SiO2 bonding. After attachment of the monolayer, the threshold voltage of the device shifts to more negative values. We explain this result in terms of an increase in the concentration of fixed positive charge at the upper Si:SiO2 interface due to protonation of the surface by the molecular monolayer.

Original languageEnglish
Pages (from-to)135-139
Number of pages5
JournalMicroelectronic Engineering
Volume63
Issue number1-3
DOIs
Publication statusPublished - Aug 2002

Fingerprint

Inversion layers
Threshold voltage
threshold voltage
inversions
Monolayers
Silicon
Protonation
Surface potential
Oxides
silicon
attachment
field effect transistors
insulators
wafers
Electric potential
Substrates
Air
oxides
shift
air

Keywords

  • Electron transport
  • Molecular electronics
  • SOI

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics

Cite this

Molecular control of the threshold voltage of an NMOS inversion layer. / Yang, Jinman; Thornton, T. J.; Kozicki, M.; De la Garza, L.; Gust, John Devens.

In: Microelectronic Engineering, Vol. 63, No. 1-3, 08.2002, p. 135-139.

Research output: Contribution to journalArticle

Yang, Jinman ; Thornton, T. J. ; Kozicki, M. ; De la Garza, L. ; Gust, John Devens. / Molecular control of the threshold voltage of an NMOS inversion layer. In: Microelectronic Engineering. 2002 ; Vol. 63, No. 1-3. pp. 135-139.
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