@article{be91557183e74de993f41a25922eb431,
title = " MoO 2 as a thermally stable oxide electrode for dynamic random-access memory capacitors ",
abstract = " Metallic MoO 2 is proposed as a new oxide electrode for dynamic random-access memory (DRAM) capacitors. Although noble metal oxide electrodes including RuO 2 and SrRuO 3 have attracted interest as capacitor electrodes, these materials have critical instability problems of ease-of-reduction during the subsequent annealing process. In contrast, MoO 2 shows excellent thermal stability of the structural and chemical properties even after annealing at 400 °C in both forming gas and O 2 atmospheres. In addition, MoO 2 electrodes induce the formation of a high temperature phase with a high dielectric constant, rutile TiO 2 , by atomic layer deposition at the relatively low temperature of 250 °C because of the structural homogeneity between MoO 2 and rutile TiO 2 . These results demonstrate that MoO 2 could be a promising electrode material for DRAM capacitors. ",
author = "Woongkyu Lee and Cho, {Cheol Jin} and Lee, {Woo Chul} and Hwang, {Cheol Seong} and Chang, {Robert P.H.} and Kim, {Seong Keun}",
note = "Funding Information: This work was supported by the National Research Foundation of Korea Grant funded by the Korean government (NRF-2018R1A2B2007525) and the Korea Institute of Science and Technology (KIST through 2E28210). Work performed at Northwestern University was funded under NSF-DMREF 1729016. This work made use of the MatCI Facility which receives support from the MRSEC Program (NSF DMR- 1720139) of the Materials Research Center at Northwestern University. Funding Information: This work was supported by the National Research Foundation of Korea Grant funded by the Korean government (NRF-2018R1A2B2007525) and the Korea Institute of Science and Technology (KIST through 2E28210). Work performed at Northwestern University was funded under NSF-DMREF 1729016. This work made use of the MatCI Facility which receives support from the MRSEC Program (NSF DMR-1720139) of the Materials Research Center at Northwestern University. Publisher Copyright: {\textcopyright} 2018 The Royal Society of Chemistry.",
year = "2018",
doi = "10.1039/c8tc04167a",
language = "English",
volume = "6",
pages = "13250--13256",
journal = "Journal of Materials Chemistry C",
issn = "2050-7526",
publisher = "Royal Society of Chemistry",
number = "48",
}