MULTIPURPOSE PLASMA REACTOR FOR MATERIALS RESEARCH AND PROCESSING.

Research output: Chapter in Book/Report/Conference proceedingChapter

16 Citations (Scopus)

Abstract

The operation of the Bell Laboratories large capacity, multipurpose plasma reactor for materials research and processing is discussed. The design of the reactor is such that all the plasma parameters can be independently controlled. This device has been used for growing, deposition, etching, as well as charged-particle-beammilling of thin films.

Original languageEnglish
Title of host publicationJ Vac Sci Technol
Pages278-280
Number of pages3
Volume14
Edition1
Publication statusPublished - Jan 1976
EventProc of Natl Symp of AVS, 23rd - Chicago, IL, USA
Duration: Sep 21 1976Sep 24 1976

Other

OtherProc of Natl Symp of AVS, 23rd
CityChicago, IL, USA
Period9/21/769/24/76

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Chang, R. P. H. (1976). MULTIPURPOSE PLASMA REACTOR FOR MATERIALS RESEARCH AND PROCESSING. In J Vac Sci Technol (1 ed., Vol. 14, pp. 278-280)