Multiscale patterning of plasmonic metamaterials

Joel Henzie, Min Hyung Lee, Teri W Odom

Research output: Contribution to journalArticle

412 Citations (Scopus)

Abstract

The interaction of light with surface plasmons - collective oscillations of free electrons - in metallic nanostructures has resulted in demonstrations of enhanced optical transmission, collimation of light through a subwavelength aperture, negative permeability and refraction at visible wavelengths, and second-harmonic generation from magnetic metamaterials. The structures that display these plasmonic phenomena typically consist of ordered arrays of particles or holes with sizes of the order of 100 nm. However, surface plasmons can interact with each other over much longer distances, so the ability to organize nanoscale particles or holes over multiple length scales could lead to new plasmonic metamaterials with novel optical properties. Here, we present a high-throughput nanofabrication technique - soft interference lithography - that combines the ability of interference lithography to produce wafer-scale nanopatterns with the versatility of soft lithography, and use it to create such plasmonic metamaterials. Metal films perforated with quasi-infinite arrays of 100-nm holes were generated over areas greater than 10 cm2, exhibiting sharp spectral features that changed in relative amplitude and shifted to longer wavelengths when exposed to increased refractive index environments. Moreover, gold nanohole arrays patterned into microscale patches exhibited strikingly different transmission properties; for instance, patches of nanoholes displayed narrow resonances (

Original languageEnglish
Pages (from-to)549-554
Number of pages6
JournalNature Nanotechnology
Volume2
Issue number9
DOIs
Publication statusPublished - Sep 2007

Fingerprint

Metamaterials
Lithography
Plasmons
lithography
plasmons
interference
Wavelength
nanofabrication
collimation
versatility
Harmonic generation
Light transmission
Refraction
Nanotechnology
metal films
wavelengths
Gold
microbalances
free electrons
refraction

ASJC Scopus subject areas

  • Bioengineering
  • Biomedical Engineering
  • Materials Science(all)
  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics

Cite this

Multiscale patterning of plasmonic metamaterials. / Henzie, Joel; Lee, Min Hyung; Odom, Teri W.

In: Nature Nanotechnology, Vol. 2, No. 9, 09.2007, p. 549-554.

Research output: Contribution to journalArticle

Henzie, Joel ; Lee, Min Hyung ; Odom, Teri W. / Multiscale patterning of plasmonic metamaterials. In: Nature Nanotechnology. 2007 ; Vol. 2, No. 9. pp. 549-554.
@article{d8185792f76042be926f83e9ee44ae99,
title = "Multiscale patterning of plasmonic metamaterials",
abstract = "The interaction of light with surface plasmons - collective oscillations of free electrons - in metallic nanostructures has resulted in demonstrations of enhanced optical transmission, collimation of light through a subwavelength aperture, negative permeability and refraction at visible wavelengths, and second-harmonic generation from magnetic metamaterials. The structures that display these plasmonic phenomena typically consist of ordered arrays of particles or holes with sizes of the order of 100 nm. However, surface plasmons can interact with each other over much longer distances, so the ability to organize nanoscale particles or holes over multiple length scales could lead to new plasmonic metamaterials with novel optical properties. Here, we present a high-throughput nanofabrication technique - soft interference lithography - that combines the ability of interference lithography to produce wafer-scale nanopatterns with the versatility of soft lithography, and use it to create such plasmonic metamaterials. Metal films perforated with quasi-infinite arrays of 100-nm holes were generated over areas greater than 10 cm2, exhibiting sharp spectral features that changed in relative amplitude and shifted to longer wavelengths when exposed to increased refractive index environments. Moreover, gold nanohole arrays patterned into microscale patches exhibited strikingly different transmission properties; for instance, patches of nanoholes displayed narrow resonances (",
author = "Joel Henzie and Lee, {Min Hyung} and Odom, {Teri W}",
year = "2007",
month = "9",
doi = "10.1038/nnano.2007.252",
language = "English",
volume = "2",
pages = "549--554",
journal = "Nature Nanotechnology",
issn = "1748-3387",
publisher = "Nature Publishing Group",
number = "9",

}

TY - JOUR

T1 - Multiscale patterning of plasmonic metamaterials

AU - Henzie, Joel

AU - Lee, Min Hyung

AU - Odom, Teri W

PY - 2007/9

Y1 - 2007/9

N2 - The interaction of light with surface plasmons - collective oscillations of free electrons - in metallic nanostructures has resulted in demonstrations of enhanced optical transmission, collimation of light through a subwavelength aperture, negative permeability and refraction at visible wavelengths, and second-harmonic generation from magnetic metamaterials. The structures that display these plasmonic phenomena typically consist of ordered arrays of particles or holes with sizes of the order of 100 nm. However, surface plasmons can interact with each other over much longer distances, so the ability to organize nanoscale particles or holes over multiple length scales could lead to new plasmonic metamaterials with novel optical properties. Here, we present a high-throughput nanofabrication technique - soft interference lithography - that combines the ability of interference lithography to produce wafer-scale nanopatterns with the versatility of soft lithography, and use it to create such plasmonic metamaterials. Metal films perforated with quasi-infinite arrays of 100-nm holes were generated over areas greater than 10 cm2, exhibiting sharp spectral features that changed in relative amplitude and shifted to longer wavelengths when exposed to increased refractive index environments. Moreover, gold nanohole arrays patterned into microscale patches exhibited strikingly different transmission properties; for instance, patches of nanoholes displayed narrow resonances (

AB - The interaction of light with surface plasmons - collective oscillations of free electrons - in metallic nanostructures has resulted in demonstrations of enhanced optical transmission, collimation of light through a subwavelength aperture, negative permeability and refraction at visible wavelengths, and second-harmonic generation from magnetic metamaterials. The structures that display these plasmonic phenomena typically consist of ordered arrays of particles or holes with sizes of the order of 100 nm. However, surface plasmons can interact with each other over much longer distances, so the ability to organize nanoscale particles or holes over multiple length scales could lead to new plasmonic metamaterials with novel optical properties. Here, we present a high-throughput nanofabrication technique - soft interference lithography - that combines the ability of interference lithography to produce wafer-scale nanopatterns with the versatility of soft lithography, and use it to create such plasmonic metamaterials. Metal films perforated with quasi-infinite arrays of 100-nm holes were generated over areas greater than 10 cm2, exhibiting sharp spectral features that changed in relative amplitude and shifted to longer wavelengths when exposed to increased refractive index environments. Moreover, gold nanohole arrays patterned into microscale patches exhibited strikingly different transmission properties; for instance, patches of nanoholes displayed narrow resonances (

UR - http://www.scopus.com/inward/record.url?scp=34548399047&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34548399047&partnerID=8YFLogxK

U2 - 10.1038/nnano.2007.252

DO - 10.1038/nnano.2007.252

M3 - Article

VL - 2

SP - 549

EP - 554

JO - Nature Nanotechnology

JF - Nature Nanotechnology

SN - 1748-3387

IS - 9

ER -