Nanoelectromechanical resonator arrays for ultrafast, gas-phase chromatographic chemical analysis

Mo Li; E. B. Myers; H. X. Tang; S. J. Aldridge; H. C. McCaig; J. J. Whiting; R. J. Simonson; N. S. Lewis; M. L. Roukes

doi:10.1021/nl101586s

Nanoelectromechanical resonator arrays for ultrafast, gas-phase chromatographic chemical analysis

Mo Li, E. B. Myers, H. X. Tang, S. J. Aldridge, H. C. McCaig, J. J. Whiting, R. J. Simonson, N. S. Lewis, M. L. Roukes

California Institute of Technology

Research output: Contribution to journal › Article › peer-review

133 Citations (Scopus)

Abstract

Miniaturized gas chromatography (GC) systems can provide fast, quantitative analysis of chemical vapors in an ultrasmall package. We describe a chemical sensor technology based on resonant nanoelectromechanical systems (NEMS) mass detectors that provides the speed, sensitivity, specificity, and size required by the microscale GC paradigm. Such NEMS sensors have demonstrated detection of subparts per billion (ppb) concentrations of a phosphonate analyte. By combining two channels of NEMS detection with an ultrafast GC front-end, chromatographic analysis of 13 chemicals was performed within a 5 s time window.

Original language	English
Pages (from-to)	3899-3903
Number of pages	5
Journal	Nano letters
Volume	10
Issue number	10
DOIs	https://doi.org/10.1021/nl101586s
Publication status	Published - Oct 13 2010

Keywords

NEMS
gas chromatography
gas detectors
mass sensing

ASJC Scopus subject areas

Bioengineering
Chemistry(all)
Materials Science(all)
Condensed Matter Physics
Mechanical Engineering

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10.1021/nl101586s

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abstract = "Miniaturized gas chromatography (GC) systems can provide fast, quantitative analysis of chemical vapors in an ultrasmall package. We describe a chemical sensor technology based on resonant nanoelectromechanical systems (NEMS) mass detectors that provides the speed, sensitivity, specificity, and size required by the microscale GC paradigm. Such NEMS sensors have demonstrated detection of subparts per billion (ppb) concentrations of a phosphonate analyte. By combining two channels of NEMS detection with an ultrafast GC front-end, chromatographic analysis of 13 chemicals was performed within a 5 s time window.",

keywords = "NEMS, gas chromatography, gas detectors, mass sensing",

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AU - Li, Mo

AU - Myers, E. B.

AU - Tang, H. X.

AU - Aldridge, S. J.

AU - McCaig, H. C.

AU - Whiting, J. J.

AU - Simonson, R. J.

AU - Lewis, N. S.

AU - Roukes, M. L.

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KW - gas detectors

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Nanoelectromechanical resonator arrays for ultrafast, gas-phase chromatographic chemical analysis

Abstract

Keywords

ASJC Scopus subject areas

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