Nanofabrication of plasmonic structures

Joel Henzie, Jeunghoon Lee, Min Hyung Lee, Warefta Hasan, Teri W. Odom

Research output: Contribution to journalReview articlepeer-review

230 Citations (Scopus)


This review focuses on nanofabrication tools, based on soft lithography, which can generate a wide range of noble-metal structures with exceptional optical properties. These techniques offer a scalable and practical approach for producing arrays of complementary plasmonic structures (nanoholes and nanoparticles) and, in addition, expand the possible architectures of plasmonic materials because the metal building blocks can be organized over multiple length scales. We describe the preparation and characterization of five different systems: subwavelength nanohole arrays, finite arrays of nanoholes, microscale arrays of nanoholes, multiscale arrays of nanoparticles, and pyramidal particles. We also discuss how the surface plasmon resonances of these structures can be tuned across visible and near-infrared wavelengths by varying different parameters. Applications and future prospects of these nanostructured metals are addressed.

Original languageEnglish
Pages (from-to)147-165
Number of pages19
JournalAnnual Review of Physical Chemistry
Publication statusPublished - May 2009


  • Multiscale patterning
  • Nanohole arrays
  • Pyramidal nanoparticles
  • Refractive-index sensing
  • Surface plasmons

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry

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