Nanoscale control of friction and chemistry on silicon surfaces

Andrew S. Baluch, Rajiv Basu, Nathan P. Guisinger, C. Reagan Kinser, Donald E. Kramer, Matthew W. Such, Mark C. Hersam

Research output: Contribution to journalConference article

Original languageEnglish
Pages (from-to)539-548
Number of pages10
JournalMaterials Research Society Symposium - Proceedings
Volume750
DOIs
Publication statusPublished - Jan 1 2002
EventSurface Engineering 2002 Sythesis, Characterization and Applications - Boston, MA, United States
Duration: Dec 2 2002Dec 5 2002

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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