Neutralization of energetic He ions scattered from clean "2 × 1" Si (100)

R. Haight, L. C. Feldman, T. M. Buck, W. M. Gibson

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Abstract

We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

Original languageEnglish
Pages (from-to)501-504
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Volume2
Issue number1-3
DOIs
Publication statusPublished - Mar 1984

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ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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