Abstract
We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 501-504 |
| Number of pages | 4 |
| Journal | Nuclear Inst. and Methods in Physics Research, B |
| Volume | 2 |
| Issue number | 1-3 |
| DOIs | |
| Publication status | Published - 1984 |
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ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Instrumentation
- Surfaces and Interfaces
Cite this
Neutralization of energetic He ions scattered from clean "2 × 1" Si (100). / Haight, R.; Feldman, Leonard C; Buck, T. M.; Gibson, W. M.
In: Nuclear Inst. and Methods in Physics Research, B, Vol. 2, No. 1-3, 1984, p. 501-504.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Neutralization of energetic He ions scattered from clean "2 × 1" Si (100)
AU - Haight, R.
AU - Feldman, Leonard C
AU - Buck, T. M.
AU - Gibson, W. M.
PY - 1984
Y1 - 1984
N2 - We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.
AB - We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.
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UR - http://www.scopus.com/inward/citedby.url?scp=48749135089&partnerID=8YFLogxK
U2 - 10.1016/0168-583X(84)90253-2
DO - 10.1016/0168-583X(84)90253-2
M3 - Article
VL - 2
SP - 501
EP - 504
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1-3
ER -