Neutralization of energetic He ions scattered from clean "2 × 1" Si (100)

R. Haight; L. C. Feldman; T. M. Buck; W. M. Gibson

doi:10.1016/0168-583X(84)90253-2

Neutralization of energetic He ions scattered from clean "2 × 1" Si (100)

R. Haight, L. C. Feldman, T. M. Buck, W. M. Gibson

Rutgers University

Research output: Contribution to journal › Article

6 Citations (Scopus)

Abstract

We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

Original language	English
Pages (from-to)	501-504
Number of pages	4
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	2
Issue number	1-3
DOIs	https://doi.org/10.1016/0168-583X(84)90253-2
Publication status	Published - Mar 1984

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

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10.1016/0168-583X(84)90253-2

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Haight, R., Feldman, L. C., Buck, T. M., & Gibson, W. M. (1984). Neutralization of energetic He ions scattered from clean "2 × 1" Si (100). Nuclear Inst. and Methods in Physics Research, B, 2(1-3), 501-504. https://doi.org/10.1016/0168-583X(84)90253-2

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