Neutralization of energetic He ions scattered from clean "2 × 1" Si (100)

R. Haight, Leonard C Feldman, T. M. Buck, W. M. Gibson

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

Original languageEnglish
Pages (from-to)501-504
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Volume2
Issue number1-3
DOIs
Publication statusPublished - 1984

Fingerprint

Ions
ions
solid surfaces

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Neutralization of energetic He ions scattered from clean "2 × 1" Si (100). / Haight, R.; Feldman, Leonard C; Buck, T. M.; Gibson, W. M.

In: Nuclear Inst. and Methods in Physics Research, B, Vol. 2, No. 1-3, 1984, p. 501-504.

Research output: Contribution to journalArticle

@article{083a748cdbe84db78a1690f5d9cb4cef,
title = "Neutralization of energetic He ions scattered from clean {"}2 × 1{"} Si (100)",
abstract = "We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned {"}2 × 1{"} Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.",
author = "R. Haight and Feldman, {Leonard C} and Buck, {T. M.} and Gibson, {W. M.}",
year = "1984",
doi = "10.1016/0168-583X(84)90253-2",
language = "English",
volume = "2",
pages = "501--504",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
number = "1-3",

}

TY - JOUR

T1 - Neutralization of energetic He ions scattered from clean "2 × 1" Si (100)

AU - Haight, R.

AU - Feldman, Leonard C

AU - Buck, T. M.

AU - Gibson, W. M.

PY - 1984

Y1 - 1984

N2 - We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

AB - We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

UR - http://www.scopus.com/inward/record.url?scp=48749135089&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=48749135089&partnerID=8YFLogxK

U2 - 10.1016/0168-583X(84)90253-2

DO - 10.1016/0168-583X(84)90253-2

M3 - Article

VL - 2

SP - 501

EP - 504

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 1-3

ER -