Neutralization of energetic He ions scattered from clean "2 × 1" Si (100)

R. Haight; L. C. Feldman; T. M. Buck; W. M. Gibson

doi:10.1016/0168-583X(84)90253-2

Neutralization of energetic He ions scattered from clean "2 × 1" Si (100)

R. Haight, L. C. Feldman, T. M. Buck, W. M. Gibson

Rutgers University

Research output: Contribution to journal › Article

6 Citations (Scopus)

Abstract

We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

Original language	English
Pages (from-to)	501-504
Number of pages	4
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	2
Issue number	1-3
DOIs	https://doi.org/10.1016/0168-583X(84)90253-2
Publication status	Published - Mar 1984

Fingerprint

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

Cite this

Haight, R., Feldman, L. C., Buck, T. M., & Gibson, W. M. (1984). Neutralization of energetic He ions scattered from clean "2 × 1" Si (100). Nuclear Inst. and Methods in Physics Research, B, 2(1-3), 501-504. https://doi.org/10.1016/0168-583X(84)90253-2

@article{083a748cdbe84db78a1690f5d9cb4cef,

title = "Neutralization of energetic He ions scattered from clean {"}2 × 1{"} Si (100)",

abstract = "We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned {"}2 × 1{"} Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.",

author = "R. Haight and Feldman, {L. C.} and Buck, {T. M.} and Gibson, {W. M.}",

year = "1984",

month = mar

doi = "10.1016/0168-583X(84)90253-2",

language = "English",

volume = "2",

pages = "501--504",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "1-3",

}

TY - JOUR

T1 - Neutralization of energetic He ions scattered from clean "2 × 1" Si (100)

AU - Haight, R.

AU - Feldman, L. C.

AU - Buck, T. M.

AU - Gibson, W. M.

PY - 1984/3

Y1 - 1984/3

N2 - We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

AB - We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

UR - http://www.scopus.com/inward/record.url?scp=48749135089&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=48749135089&partnerID=8YFLogxK

U2 - 10.1016/0168-583X(84)90253-2

DO - 10.1016/0168-583X(84)90253-2

M3 - Article

AN - SCOPUS:48749135089

VL - 2

SP - 501

EP - 504

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 1-3

ER -

Access to Document

10.1016/0168-583X(84)90253-2