Neutralization of energetic He ions scattered from clean "2 × 1" Si (100)

R. Haight, L. C. Feldman, T. M. Buck, W. M. Gibson

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

Original languageEnglish
Pages (from-to)501-504
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Issue number1-3
Publication statusPublished - Mar 1984

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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