TY - JOUR
T1 - Neutralization of energetic He ions scattered from clean "2 × 1" Si (100)
AU - Haight, R.
AU - Feldman, L. C.
AU - Buck, T. M.
AU - Gibson, W. M.
PY - 1984/3
Y1 - 1984/3
N2 - We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.
AB - We report on a comprehensive study of the neutralization of 75-180 keV He ions scattered from the UHV cleaned "2 × 1" Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.
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U2 - 10.1016/0168-583X(84)90253-2
DO - 10.1016/0168-583X(84)90253-2
M3 - Article
AN - SCOPUS:48749135089
VL - 2
SP - 501
EP - 504
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1-3
ER -