NEUTRALIZATION OF ENERGETIC He IONS SCATTERED FROM CLEAN '2 multiplied by 1' Si (100).

R. Haight, Leonard C Feldman, T. M. Buck, W. M. Gibson

Research output: Contribution to journalArticle

Abstract

The authors report on a comprehensive study of the neutralization of 75-180 kev He ions scattered from the UHV cleaned Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

Original languageEnglish
JournalNuclear Inst. and Methods in Physics Research, B
Volume230
Publication statusPublished - Mar 1983

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ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

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