NEUTRALIZATION OF ENERGETIC He IONS SCATTERED FROM CLEAN '2 multiplied by 1' Si (100).

R. Haight; Leonard C Feldman; T. M. Buck; W. M. Gibson

NEUTRALIZATION OF ENERGETIC He IONS SCATTERED FROM CLEAN '2 multiplied by 1' Si (100).

R. Haight, Leonard C Feldman, T. M. Buck, W. M. Gibson

Rutgers University

Research output: Contribution to journal › Article › peer-review

Abstract

The authors report on a comprehensive study of the neutralization of 75-180 kev He ions scattered from the UHV cleaned Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

Original language	English
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	230
Publication status	Published - Mar 1983

ASJC Scopus subject areas

Surfaces, Coatings and Films
Instrumentation
Surfaces and Interfaces

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title = "NEUTRALIZATION OF ENERGETIC He IONS SCATTERED FROM CLEAN '2 multiplied by 1' Si (100).",

abstract = "The authors report on a comprehensive study of the neutralization of 75-180 kev He ions scattered from the UHV cleaned Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.",

author = "R. Haight and Feldman, {Leonard C} and Buck, {T. M.} and Gibson, {W. M.}",

year = "1983",

month = mar,

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volume = "230",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

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T1 - NEUTRALIZATION OF ENERGETIC He IONS SCATTERED FROM CLEAN '2 multiplied by 1' Si (100).

AU - Haight, R.

AU - Feldman, Leonard C

AU - Buck, T. M.

AU - Gibson, W. M.

PY - 1983/3

Y1 - 1983/3

N2 - The authors report on a comprehensive study of the neutralization of 75-180 kev He ions scattered from the UHV cleaned Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

AB - The authors report on a comprehensive study of the neutralization of 75-180 kev He ions scattered from the UHV cleaned Si (100) surface using surface sensitive channeling techniques. It is shown that ions are neutralized exclusively at the solid surface on the ion's outward path. Angular and depth dependence results are discussed.

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VL - 230

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

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