New hybrid physical vapor deposition/organometallic chemical vapor deposition route to high Tc superconducting Tl-Ba-Ca-Cu-O thin films

D. S. Richeson, L. M. Tonge, X. K. Wang, H. O. Marcy, Tobin J Marks, J. B. Ketterson, Robert P. H. Chang, C. R. Kannewurf

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

High Tc superconducting Tl-Ba-Ca-Cu-O thin films have been prepared by a novel hybrid technique that combines electron beam evaporation with organometallic chemical vapor deposition (OMCVD). Multilayer thin films of Ba-Ca-Cu-O are prepared by sequential evaporation of BaF2, CaF 2, and Cu sources onto single-crystal MgO (100) or yttria-stabilized zirconia substrates followed by annealing in a water vapor-saturated oxygen atmosphere. Thallium is then incorporated in these films in either of two ways: (1) OMCVD using thallium(cyclopentadienide) as the source or (2) vapor diffusion using bulk Tl-Ba-Ca-Cu-O superconductor as the source. The resultant films are single phase, consisting predominantly of Tl1Ba2Ca 2Cu3Ox with crystallite Cu-O planes preferentially oriented parallel to the substrate surface. Resistivity measurements indicate superconducting onset temperatures above 120 K with zero resistance by 104 K. By eliminating the water vapor in the initial anneal, fluoride (originating from the Ba and Ca sources) may be retained in the film. Upon T1 incorporation, this promotes formation of the Tl1Ba 2Ca1Cu2Ox phase with preferential crystallite c-axis orientation perpendicular to the substrate surface.

Original languageEnglish
Pages (from-to)2778-2780
Number of pages3
JournalApplied Physics Letters
Volume55
Issue number26
DOIs
Publication statusPublished - 1989

Fingerprint

metalorganic chemical vapor deposition
routes
vapor deposition
thallium
thin films
water vapor
evaporation
yttria-stabilized zirconia
fluorides
electron beams
vapors
atmospheres
electrical resistivity
annealing
single crystals
oxygen
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

New hybrid physical vapor deposition/organometallic chemical vapor deposition route to high Tc superconducting Tl-Ba-Ca-Cu-O thin films. / Richeson, D. S.; Tonge, L. M.; Wang, X. K.; Marcy, H. O.; Marks, Tobin J; Ketterson, J. B.; Chang, Robert P. H.; Kannewurf, C. R.

In: Applied Physics Letters, Vol. 55, No. 26, 1989, p. 2778-2780.

Research output: Contribution to journalArticle

Richeson, D. S. ; Tonge, L. M. ; Wang, X. K. ; Marcy, H. O. ; Marks, Tobin J ; Ketterson, J. B. ; Chang, Robert P. H. ; Kannewurf, C. R. / New hybrid physical vapor deposition/organometallic chemical vapor deposition route to high Tc superconducting Tl-Ba-Ca-Cu-O thin films. In: Applied Physics Letters. 1989 ; Vol. 55, No. 26. pp. 2778-2780.
@article{2afc2d70ab8c4dd9bb8012d820e7917f,
title = "New hybrid physical vapor deposition/organometallic chemical vapor deposition route to high Tc superconducting Tl-Ba-Ca-Cu-O thin films",
abstract = "High Tc superconducting Tl-Ba-Ca-Cu-O thin films have been prepared by a novel hybrid technique that combines electron beam evaporation with organometallic chemical vapor deposition (OMCVD). Multilayer thin films of Ba-Ca-Cu-O are prepared by sequential evaporation of BaF2, CaF 2, and Cu sources onto single-crystal MgO (100) or yttria-stabilized zirconia substrates followed by annealing in a water vapor-saturated oxygen atmosphere. Thallium is then incorporated in these films in either of two ways: (1) OMCVD using thallium(cyclopentadienide) as the source or (2) vapor diffusion using bulk Tl-Ba-Ca-Cu-O superconductor as the source. The resultant films are single phase, consisting predominantly of Tl1Ba2Ca 2Cu3Ox with crystallite Cu-O planes preferentially oriented parallel to the substrate surface. Resistivity measurements indicate superconducting onset temperatures above 120 K with zero resistance by 104 K. By eliminating the water vapor in the initial anneal, fluoride (originating from the Ba and Ca sources) may be retained in the film. Upon T1 incorporation, this promotes formation of the Tl1Ba 2Ca1Cu2Ox phase with preferential crystallite c-axis orientation perpendicular to the substrate surface.",
author = "Richeson, {D. S.} and Tonge, {L. M.} and Wang, {X. K.} and Marcy, {H. O.} and Marks, {Tobin J} and Ketterson, {J. B.} and Chang, {Robert P. H.} and Kannewurf, {C. R.}",
year = "1989",
doi = "10.1063/1.102372",
language = "English",
volume = "55",
pages = "2778--2780",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "26",

}

TY - JOUR

T1 - New hybrid physical vapor deposition/organometallic chemical vapor deposition route to high Tc superconducting Tl-Ba-Ca-Cu-O thin films

AU - Richeson, D. S.

AU - Tonge, L. M.

AU - Wang, X. K.

AU - Marcy, H. O.

AU - Marks, Tobin J

AU - Ketterson, J. B.

AU - Chang, Robert P. H.

AU - Kannewurf, C. R.

PY - 1989

Y1 - 1989

N2 - High Tc superconducting Tl-Ba-Ca-Cu-O thin films have been prepared by a novel hybrid technique that combines electron beam evaporation with organometallic chemical vapor deposition (OMCVD). Multilayer thin films of Ba-Ca-Cu-O are prepared by sequential evaporation of BaF2, CaF 2, and Cu sources onto single-crystal MgO (100) or yttria-stabilized zirconia substrates followed by annealing in a water vapor-saturated oxygen atmosphere. Thallium is then incorporated in these films in either of two ways: (1) OMCVD using thallium(cyclopentadienide) as the source or (2) vapor diffusion using bulk Tl-Ba-Ca-Cu-O superconductor as the source. The resultant films are single phase, consisting predominantly of Tl1Ba2Ca 2Cu3Ox with crystallite Cu-O planes preferentially oriented parallel to the substrate surface. Resistivity measurements indicate superconducting onset temperatures above 120 K with zero resistance by 104 K. By eliminating the water vapor in the initial anneal, fluoride (originating from the Ba and Ca sources) may be retained in the film. Upon T1 incorporation, this promotes formation of the Tl1Ba 2Ca1Cu2Ox phase with preferential crystallite c-axis orientation perpendicular to the substrate surface.

AB - High Tc superconducting Tl-Ba-Ca-Cu-O thin films have been prepared by a novel hybrid technique that combines electron beam evaporation with organometallic chemical vapor deposition (OMCVD). Multilayer thin films of Ba-Ca-Cu-O are prepared by sequential evaporation of BaF2, CaF 2, and Cu sources onto single-crystal MgO (100) or yttria-stabilized zirconia substrates followed by annealing in a water vapor-saturated oxygen atmosphere. Thallium is then incorporated in these films in either of two ways: (1) OMCVD using thallium(cyclopentadienide) as the source or (2) vapor diffusion using bulk Tl-Ba-Ca-Cu-O superconductor as the source. The resultant films are single phase, consisting predominantly of Tl1Ba2Ca 2Cu3Ox with crystallite Cu-O planes preferentially oriented parallel to the substrate surface. Resistivity measurements indicate superconducting onset temperatures above 120 K with zero resistance by 104 K. By eliminating the water vapor in the initial anneal, fluoride (originating from the Ba and Ca sources) may be retained in the film. Upon T1 incorporation, this promotes formation of the Tl1Ba 2Ca1Cu2Ox phase with preferential crystallite c-axis orientation perpendicular to the substrate surface.

UR - http://www.scopus.com/inward/record.url?scp=0041958153&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0041958153&partnerID=8YFLogxK

U2 - 10.1063/1.102372

DO - 10.1063/1.102372

M3 - Article

VL - 55

SP - 2778

EP - 2780

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 26

ER -