Abstract
Novel approaches including combustion synthesis achieved via both spin-coating/post annealing and spray-coating/in-situ annealing can be used to generate high-quality metal oxide thin films, including IGZO, and high performance metal oxide TFTs at relatively low temperatures. Furthermore, we demonstrate metal oxide TFTs using proprietary solution-processed dielectric and passivation layers.
| Original language | English |
|---|---|
| Pages (from-to) | 427-430 |
| Number of pages | 4 |
| Journal | Digest of Technical Papers - SID International Symposium |
| Volume | 45 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Jun 2014 |
Keywords
- combustion synthesis
- dielectric
- IGZO
- metal oxide TFT
- solution process
- spin coating with post annealing
- spray coating with in-situ annealing
ASJC Scopus subject areas
- Engineering(all)
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Hsieh, H. H., Yu, X., Xia, Y., Sheets, C. W., Hsiao, C. C., Marks, T. J., & Facchetti, A. A. (2014). Novel approaches for fabricating high-performance low-temperature solution-processed metal oxide transistors. Digest of Technical Papers - SID International Symposium, 45(1), 427-430. https://doi.org/10.1002/j.2168-0159.2014.tb00115.x