TY - JOUR
T1 - Novel approaches for fabricating high-performance low-temperature solution-processed metal oxide transistors
AU - Hsieh, Hsing Hung
AU - Yu, Xinge
AU - Xia, Yu
AU - Sheets, Chris W.
AU - Hsiao, Chung Chin
AU - Marks, Tobin J.
AU - Facchetti, And Antonio
PY - 2014/6
Y1 - 2014/6
N2 - Novel approaches including combustion synthesis achieved via both spin-coating/post annealing and spray-coating/in-situ annealing can be used to generate high-quality metal oxide thin films, including IGZO, and high performance metal oxide TFTs at relatively low temperatures. Furthermore, we demonstrate metal oxide TFTs using proprietary solution-processed dielectric and passivation layers.
AB - Novel approaches including combustion synthesis achieved via both spin-coating/post annealing and spray-coating/in-situ annealing can be used to generate high-quality metal oxide thin films, including IGZO, and high performance metal oxide TFTs at relatively low temperatures. Furthermore, we demonstrate metal oxide TFTs using proprietary solution-processed dielectric and passivation layers.
KW - combustion synthesis
KW - dielectric
KW - IGZO
KW - metal oxide TFT
KW - solution process
KW - spin coating with post annealing
KW - spray coating with in-situ annealing
UR - http://www.scopus.com/inward/record.url?scp=84905047972&partnerID=8YFLogxK
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U2 - 10.1002/j.2168-0159.2014.tb00115.x
DO - 10.1002/j.2168-0159.2014.tb00115.x
M3 - Article
AN - SCOPUS:84905047972
VL - 45
SP - 427
EP - 430
JO - Digest of Technical Papers - SID International Symposium
JF - Digest of Technical Papers - SID International Symposium
SN - 0097-966X
IS - 1
ER -