Novel approaches for fabricating high-performance low-temperature solution-processed metal oxide transistors

Hsing Hung Hsieh, Xinge Yu, Yu Xia, Chris W. Sheets, Chung Chin Hsiao, Tobin J. Marks, And Antonio Facchetti

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Novel approaches including combustion synthesis achieved via both spin-coating/post annealing and spray-coating/in-situ annealing can be used to generate high-quality metal oxide thin films, including IGZO, and high performance metal oxide TFTs at relatively low temperatures. Furthermore, we demonstrate metal oxide TFTs using proprietary solution-processed dielectric and passivation layers.

Original languageEnglish
Pages (from-to)427-430
Number of pages4
JournalDigest of Technical Papers - SID International Symposium
Volume45
Issue number1
DOIs
Publication statusPublished - Jun 2014

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Keywords

  • combustion synthesis
  • dielectric
  • IGZO
  • metal oxide TFT
  • solution process
  • spin coating with post annealing
  • spray coating with in-situ annealing

ASJC Scopus subject areas

  • Engineering(all)

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