Abstract
Novel approaches including combustion synthesis achieved via both spin-coating/post annealing and spray-coating/in-situ annealing can be used to generate high-quality metal oxide thin films, including IGZO, and high performance metal oxide TFTs at relatively low temperatures. Furthermore, we demonstrate metal oxide TFTs using proprietary solution-processed dielectric and passivation layers.
| Original language | English |
|---|---|
| Title of host publication | Digest of Technical Papers - SID International Symposium |
| Publisher | Blackwell Publishing Ltd |
| Pages | 427-430 |
| Number of pages | 4 |
| Volume | 45 |
| Edition | 1 |
| DOIs | |
| Publication status | Published - 2014 |
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Keywords
- combustion synthesis
- dielectric
- IGZO
- metal oxide TFT
- solution process
- spin coating with post annealing
- spray coating with in-situ annealing
ASJC Scopus subject areas
- Engineering(all)
Cite this
Novel approaches for fabricating high-performance low-temperature solution-processed metal oxide transistors. / Hsieh, Hsing Hung; Yu, Xinge; Xia, Yu; Sheets, Chris W.; Hsiao, Chung Chin; Marks, Tobin J; Facchetti, And Antonio.
Digest of Technical Papers - SID International Symposium. Vol. 45 1. ed. Blackwell Publishing Ltd, 2014. p. 427-430.Research output: Chapter in Book/Report/Conference proceeding › Chapter
}
TY - CHAP
T1 - Novel approaches for fabricating high-performance low-temperature solution-processed metal oxide transistors
AU - Hsieh, Hsing Hung
AU - Yu, Xinge
AU - Xia, Yu
AU - Sheets, Chris W.
AU - Hsiao, Chung Chin
AU - Marks, Tobin J
AU - Facchetti, And Antonio
PY - 2014
Y1 - 2014
N2 - Novel approaches including combustion synthesis achieved via both spin-coating/post annealing and spray-coating/in-situ annealing can be used to generate high-quality metal oxide thin films, including IGZO, and high performance metal oxide TFTs at relatively low temperatures. Furthermore, we demonstrate metal oxide TFTs using proprietary solution-processed dielectric and passivation layers.
AB - Novel approaches including combustion synthesis achieved via both spin-coating/post annealing and spray-coating/in-situ annealing can be used to generate high-quality metal oxide thin films, including IGZO, and high performance metal oxide TFTs at relatively low temperatures. Furthermore, we demonstrate metal oxide TFTs using proprietary solution-processed dielectric and passivation layers.
KW - combustion synthesis
KW - dielectric
KW - IGZO
KW - metal oxide TFT
KW - solution process
KW - spin coating with post annealing
KW - spray coating with in-situ annealing
UR - http://www.scopus.com/inward/record.url?scp=84905047972&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84905047972&partnerID=8YFLogxK
U2 - 10.1002/j.2168-0159.2014.tb00115.x
DO - 10.1002/j.2168-0159.2014.tb00115.x
M3 - Chapter
VL - 45
SP - 427
EP - 430
BT - Digest of Technical Papers - SID International Symposium
PB - Blackwell Publishing Ltd
ER -