Nucleation and growth of silver nanoparticles by AB and ABC-type atomic layer deposition

Sicelo S. Masango, Lingxuan Peng, Laurence D. Marks, Richard P. Van Duyne, Peter C Stair

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

In this work, we report synthesis strategies to produce Ag nanoparticles by AB-type and ABC-type atomic layer deposition (ALD) using trimethylphosphine(hexafluoroacetylacetonato) silver(I) ((hfac)Ag(PMe 3)) and formalin (AB-type) and (hfac)Ag(PMe3), trimethylaluminum, and H2O (ABC-type). In situ quartz crystal microbalance measurements reveal a Ag growth rate of 1-2 ng/cm2/cycle by ABC-type ALD at 110 °C and 2-10 ng/cm2/cycle for AB-type ALD at 170-200 °C. AB-type Ag ALD has a nucleation period before continuous linear growth that is shorter at 200 °C. Transmission electron microscopy reveals that AB-type Ag ALD particles have an average size of ∼1.8 nm after 10 cycles. ABC-type Ag ALD particles have an average size of ∼2.2 nm after 20 cycles. With increasing ALD cycles, ABC-type Ag ALD increases the metal loading while maintaining the particle size but AB-type Ag ALD results in the formation of bigger particles in addition to small particles. The ability to synthesize supported metal nanoparticles with well-defined particle sizes and narrow size distributions makes ALD an attractive synthesis method compared to conventional wet chemistry techniques.

Original languageEnglish
Pages (from-to)17655-17661
Number of pages7
JournalJournal of Physical Chemistry C
Volume118
Issue number31
DOIs
Publication statusPublished - Aug 7 2014

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Atomic layer deposition
atomic layer epitaxy
Silver
Nucleation
silver
nucleation
Nanoparticles
nanoparticles
cycles
Particle size
Metal nanoparticles
Quartz crystal microbalances
synthesis
quartz crystals
Formaldehyde
microbalances
metals
Metals
chemistry
Transmission electron microscopy

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Energy(all)

Cite this

Nucleation and growth of silver nanoparticles by AB and ABC-type atomic layer deposition. / Masango, Sicelo S.; Peng, Lingxuan; Marks, Laurence D.; Van Duyne, Richard P.; Stair, Peter C.

In: Journal of Physical Chemistry C, Vol. 118, No. 31, 07.08.2014, p. 17655-17661.

Research output: Contribution to journalArticle

Masango, Sicelo S. ; Peng, Lingxuan ; Marks, Laurence D. ; Van Duyne, Richard P. ; Stair, Peter C. / Nucleation and growth of silver nanoparticles by AB and ABC-type atomic layer deposition. In: Journal of Physical Chemistry C. 2014 ; Vol. 118, No. 31. pp. 17655-17661.
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