Optical video interpretation of interference colors from thin transparent films on silicon

Dunbar P. Birnie

doi:10.1016/j.matlet.2004.04.018

Optical video interpretation of interference colors from thin transparent films on silicon

Dunbar P. Birnie

Rutgers University

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

A method is tested for analyzing color video images to determine film thickness for transparent coatings on silicon. The method is robust to reasonable variations in light level, video parameters, and computer image capture spectral characteristics. The main standardizing feature of the method is to include characterization of a bare substrate along with the unknown samples (either within the view frame or as a separate sequence under identical illumination conditions during video capture). Then, the color appearance for the unknown sample can be referenced to the color appearance of the bare substrate, thereby enabling a quantitative match between the measured color and the predicted color characteristics. The technique is tested with transparent spin-on-glass (SOG) coatings that were calibrated separately. The limits of applicability and the level of accuracy that can be obtained are discussed in detail.

Original language	English
Pages (from-to)	2795-2800
Number of pages	6
Journal	Materials Letters
Volume	58
Issue number	22-23
DOIs	https://doi.org/10.1016/j.matlet.2004.04.018
Publication status	Published - Sep 2004

Keywords

Coatings
Optical properties
Spin-on-glass
Video

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Optical video interpretation of interference colors from thin transparent films on silicon",

abstract = "A method is tested for analyzing color video images to determine film thickness for transparent coatings on silicon. The method is robust to reasonable variations in light level, video parameters, and computer image capture spectral characteristics. The main standardizing feature of the method is to include characterization of a bare substrate along with the unknown samples (either within the view frame or as a separate sequence under identical illumination conditions during video capture). Then, the color appearance for the unknown sample can be referenced to the color appearance of the bare substrate, thereby enabling a quantitative match between the measured color and the predicted color characteristics. The technique is tested with transparent spin-on-glass (SOG) coatings that were calibrated separately. The limits of applicability and the level of accuracy that can be obtained are discussed in detail.",

keywords = "Coatings, Optical properties, Spin-on-glass, Video",

author = "Birnie, {Dunbar P.}",

note = "Funding Information: Video capture assistance was generously provided by Tim Conery. Reflectance spectra were collected at Donnelly with their close cooperation and assistance. I am grateful to Jim Schifko who helped make the SOG coatings imaged in this work. This work was partly supported by NSF under grant DMR 98-02334. ",

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language = "English",

volume = "58",

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journal = "Materials Letters",

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AU - Birnie, Dunbar P.

N1 - Funding Information: Video capture assistance was generously provided by Tim Conery. Reflectance spectra were collected at Donnelly with their close cooperation and assistance. I am grateful to Jim Schifko who helped make the SOG coatings imaged in this work. This work was partly supported by NSF under grant DMR 98-02334.

PY - 2004/9

Y1 - 2004/9

N2 - A method is tested for analyzing color video images to determine film thickness for transparent coatings on silicon. The method is robust to reasonable variations in light level, video parameters, and computer image capture spectral characteristics. The main standardizing feature of the method is to include characterization of a bare substrate along with the unknown samples (either within the view frame or as a separate sequence under identical illumination conditions during video capture). Then, the color appearance for the unknown sample can be referenced to the color appearance of the bare substrate, thereby enabling a quantitative match between the measured color and the predicted color characteristics. The technique is tested with transparent spin-on-glass (SOG) coatings that were calibrated separately. The limits of applicability and the level of accuracy that can be obtained are discussed in detail.

AB - A method is tested for analyzing color video images to determine film thickness for transparent coatings on silicon. The method is robust to reasonable variations in light level, video parameters, and computer image capture spectral characteristics. The main standardizing feature of the method is to include characterization of a bare substrate along with the unknown samples (either within the view frame or as a separate sequence under identical illumination conditions during video capture). Then, the color appearance for the unknown sample can be referenced to the color appearance of the bare substrate, thereby enabling a quantitative match between the measured color and the predicted color characteristics. The technique is tested with transparent spin-on-glass (SOG) coatings that were calibrated separately. The limits of applicability and the level of accuracy that can be obtained are discussed in detail.

KW - Coatings

KW - Optical properties

KW - Spin-on-glass

KW - Video

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JO - Materials Letters

JF - Materials Letters

SN - 0167-577X

IS - 22-23

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Optical video interpretation of interference colors from thin transparent films on silicon

Abstract

Keywords

ASJC Scopus subject areas

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