Optical video interpretation of interference colors from thin transparent films on silicon

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

A method is tested for analyzing color video images to determine film thickness for transparent coatings on silicon. The method is robust to reasonable variations in light level, video parameters, and computer image capture spectral characteristics. The main standardizing feature of the method is to include characterization of a bare substrate along with the unknown samples (either within the view frame or as a separate sequence under identical illumination conditions during video capture). Then, the color appearance for the unknown sample can be referenced to the color appearance of the bare substrate, thereby enabling a quantitative match between the measured color and the predicted color characteristics. The technique is tested with transparent spin-on-glass (SOG) coatings that were calibrated separately. The limits of applicability and the level of accuracy that can be obtained are discussed in detail.

Original languageEnglish
Pages (from-to)2795-2800
Number of pages6
JournalMaterials Letters
Volume58
Issue number22-23
DOIs
Publication statusPublished - Sep 2004

Fingerprint

Silicon
Color
interference
color
silicon
glass coatings
Coatings
Substrates
Film thickness
film thickness
Lighting
illumination
coatings
Glass

Keywords

  • Coatings
  • Optical properties
  • Spin-on-glass
  • Video

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Optical video interpretation of interference colors from thin transparent films on silicon. / Birnie, Dunbar P.

In: Materials Letters, Vol. 58, No. 22-23, 09.2004, p. 2795-2800.

Research output: Contribution to journalArticle

@article{347d77a51985497eb230fd169b124d2f,
title = "Optical video interpretation of interference colors from thin transparent films on silicon",
abstract = "A method is tested for analyzing color video images to determine film thickness for transparent coatings on silicon. The method is robust to reasonable variations in light level, video parameters, and computer image capture spectral characteristics. The main standardizing feature of the method is to include characterization of a bare substrate along with the unknown samples (either within the view frame or as a separate sequence under identical illumination conditions during video capture). Then, the color appearance for the unknown sample can be referenced to the color appearance of the bare substrate, thereby enabling a quantitative match between the measured color and the predicted color characteristics. The technique is tested with transparent spin-on-glass (SOG) coatings that were calibrated separately. The limits of applicability and the level of accuracy that can be obtained are discussed in detail.",
keywords = "Coatings, Optical properties, Spin-on-glass, Video",
author = "Birnie, {Dunbar P}",
year = "2004",
month = "9",
doi = "10.1016/j.matlet.2004.04.018",
language = "English",
volume = "58",
pages = "2795--2800",
journal = "Materials Letters",
issn = "0167-577X",
publisher = "Elsevier",
number = "22-23",

}

TY - JOUR

T1 - Optical video interpretation of interference colors from thin transparent films on silicon

AU - Birnie, Dunbar P

PY - 2004/9

Y1 - 2004/9

N2 - A method is tested for analyzing color video images to determine film thickness for transparent coatings on silicon. The method is robust to reasonable variations in light level, video parameters, and computer image capture spectral characteristics. The main standardizing feature of the method is to include characterization of a bare substrate along with the unknown samples (either within the view frame or as a separate sequence under identical illumination conditions during video capture). Then, the color appearance for the unknown sample can be referenced to the color appearance of the bare substrate, thereby enabling a quantitative match between the measured color and the predicted color characteristics. The technique is tested with transparent spin-on-glass (SOG) coatings that were calibrated separately. The limits of applicability and the level of accuracy that can be obtained are discussed in detail.

AB - A method is tested for analyzing color video images to determine film thickness for transparent coatings on silicon. The method is robust to reasonable variations in light level, video parameters, and computer image capture spectral characteristics. The main standardizing feature of the method is to include characterization of a bare substrate along with the unknown samples (either within the view frame or as a separate sequence under identical illumination conditions during video capture). Then, the color appearance for the unknown sample can be referenced to the color appearance of the bare substrate, thereby enabling a quantitative match between the measured color and the predicted color characteristics. The technique is tested with transparent spin-on-glass (SOG) coatings that were calibrated separately. The limits of applicability and the level of accuracy that can be obtained are discussed in detail.

KW - Coatings

KW - Optical properties

KW - Spin-on-glass

KW - Video

UR - http://www.scopus.com/inward/record.url?scp=3242669767&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=3242669767&partnerID=8YFLogxK

U2 - 10.1016/j.matlet.2004.04.018

DO - 10.1016/j.matlet.2004.04.018

M3 - Article

VL - 58

SP - 2795

EP - 2800

JO - Materials Letters

JF - Materials Letters

SN - 0167-577X

IS - 22-23

ER -