Ordered monolayer structures of boron in Si(111) and Si(100)

B. E. Weir, A. F J Levi, B. Freer, J. Bevk, Leonard C Feldman

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Abstract

We have prepared metastable, ordered monolayer structures of boron on Si (100) and Si (111) by silicon deposition atop unique surface reconstructions. These superlattice structures suggest possibilities for monolayer doping and ordered alloy structures with new electronic properties. In this paper we summarize our recent results in forming ordered structures and the electrical properties of the preserved layers.

Original languageEnglish
Pages (from-to)2269-2272
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume9
Issue number4
DOIs
Publication statusPublished - 1991

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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