Organometallic chemical vapor deposition of high Tc superconducting Bi-Sr-Ca-Cu-O films

Jiming Zhang; Jing Zhao; Henry O. Marcy; Lauren M. Tonge; Bruce W. Wessels; Tobin J Marks; Carl R. Kannewurf

doi:10.1063/1.101481

Organometallic chemical vapor deposition of high T_c superconducting Bi-Sr-Ca-Cu-O films

Jiming Zhang, Jing Zhao, Henry O. Marcy, Lauren M. Tonge, Bruce W. Wessels, Tobin J Marks, Carl R. Kannewurf

Northwestern University

Research output: Contribution to journal › Article › peer-review

61 Citations (Scopus)

Abstract

Films of the high T_c Bi-Sr-Ca-Cu-O superconductor have been prepared by organometallic chemical vapor deposition using the volatile metalorganic precursors Cu(acetylacetonate)₂, Sr(dipivaloylmethanate) ₂, and Ca(dipivaloylmethanate)₂, and triphenylbismuth. Deposition is carried out at 2 Torr with argon as the carrier gas and oxygen and water vapor as reactants. Film growth rates of 2-3 μm/h are achieved. After annealing under oxygen, energy dispersive x-ray analysis and x-ray diffraction data reveal that such films on [100] single-crystal MgO consist predominantly of the Bi₂(Sr,Ca)₃Cu₂O_x, T _c=85 K, phase and have preferential orientation of the crystallite c axes perpendicular to the substrate surface. Four-probe resistivity measurements reveal the onset of film superconductivity at ∼110 K and zero resistance by 75 K.

Original language	English
Pages (from-to)	1166-1168
Number of pages	3
Journal	Applied Physics Letters
Volume	54
Issue number	12
DOIs	https://doi.org/10.1063/1.101481
Publication status	Published - 1989

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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@article{8ace00f921b049c59c5be55200d45f41,

title = "Organometallic chemical vapor deposition of high Tc superconducting Bi-Sr-Ca-Cu-O films",

abstract = "Films of the high Tc Bi-Sr-Ca-Cu-O superconductor have been prepared by organometallic chemical vapor deposition using the volatile metalorganic precursors Cu(acetylacetonate)2, Sr(dipivaloylmethanate) 2, and Ca(dipivaloylmethanate)2, and triphenylbismuth. Deposition is carried out at 2 Torr with argon as the carrier gas and oxygen and water vapor as reactants. Film growth rates of 2-3 μm/h are achieved. After annealing under oxygen, energy dispersive x-ray analysis and x-ray diffraction data reveal that such films on [100] single-crystal MgO consist predominantly of the Bi2(Sr,Ca)3Cu2Ox, T c=85 K, phase and have preferential orientation of the crystallite c axes perpendicular to the substrate surface. Four-probe resistivity measurements reveal the onset of film superconductivity at ∼110 K and zero resistance by 75 K.",

author = "Jiming Zhang and Jing Zhao and Marcy, {Henry O.} and Tonge, {Lauren M.} and Wessels, {Bruce W.} and Marks, {Tobin J} and Kannewurf, {Carl R.}",

year = "1989",

doi = "10.1063/1.101481",

language = "English",

volume = "54",

pages = "1166--1168",

journal = "Applied Physics Letters",

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publisher = "American Institute of Physics Publising LLC",

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T1 - Organometallic chemical vapor deposition of high Tc superconducting Bi-Sr-Ca-Cu-O films

AU - Zhang, Jiming

AU - Zhao, Jing

AU - Marcy, Henry O.

AU - Tonge, Lauren M.

AU - Wessels, Bruce W.

AU - Marks, Tobin J

AU - Kannewurf, Carl R.

PY - 1989

Y1 - 1989

N2 - Films of the high Tc Bi-Sr-Ca-Cu-O superconductor have been prepared by organometallic chemical vapor deposition using the volatile metalorganic precursors Cu(acetylacetonate)2, Sr(dipivaloylmethanate) 2, and Ca(dipivaloylmethanate)2, and triphenylbismuth. Deposition is carried out at 2 Torr with argon as the carrier gas and oxygen and water vapor as reactants. Film growth rates of 2-3 μm/h are achieved. After annealing under oxygen, energy dispersive x-ray analysis and x-ray diffraction data reveal that such films on [100] single-crystal MgO consist predominantly of the Bi2(Sr,Ca)3Cu2Ox, T c=85 K, phase and have preferential orientation of the crystallite c axes perpendicular to the substrate surface. Four-probe resistivity measurements reveal the onset of film superconductivity at ∼110 K and zero resistance by 75 K.

AB - Films of the high Tc Bi-Sr-Ca-Cu-O superconductor have been prepared by organometallic chemical vapor deposition using the volatile metalorganic precursors Cu(acetylacetonate)2, Sr(dipivaloylmethanate) 2, and Ca(dipivaloylmethanate)2, and triphenylbismuth. Deposition is carried out at 2 Torr with argon as the carrier gas and oxygen and water vapor as reactants. Film growth rates of 2-3 μm/h are achieved. After annealing under oxygen, energy dispersive x-ray analysis and x-ray diffraction data reveal that such films on [100] single-crystal MgO consist predominantly of the Bi2(Sr,Ca)3Cu2Ox, T c=85 K, phase and have preferential orientation of the crystallite c axes perpendicular to the substrate surface. Four-probe resistivity measurements reveal the onset of film superconductivity at ∼110 K and zero resistance by 75 K.

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