Particle-solid interactions and 21st century materials science

L. C. Feldman, G. Lupke, N. H. Tolk, R. Lopez, R. F. Haglund, T. E. Haynes, L. A. Boatner

Research output: Contribution to journalConference article

4 Citations (Scopus)

Abstract

The basic physics that governs the interaction of energetic ion beams with solids has its roots in the atomic and nuclear physics of the last century. The central formalism of Jens Lindhard, describing the "particle-solid interaction", provides a valuable quantitative guide to statistically meaningful quantities such as energy loss, ranges, range straggling, channeling effects, sputtering coefficients, and damage intensity and profiles. Modern materials modification (nanoscience, solid state dynamics) requires atomic scale control of the particle-solid interaction. Two recent experimental examples are discussed: (1) the control of the size distribution of nanocrystals formed in implanted materials and (2) the investigation of the site-specific implantation of hydrogen into silicon. Both cases illustrate unique solid-state configurations, created by ion implantation, that address issues of current materials science interest.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume212
Issue number1-4
DOIs
Publication statusPublished - Dec 1 2003
EventAtomic Collisions in Solids - India, India
Duration: Jan 19 2003Jan 24 2003

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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