Passivation of ferroelectric PZT capacitors using spin-on-glass

J. R. Schifko, E. A. Kneer, Dunbar P Birnie, R. D. Schrimpf

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Lead-Zirconate-Titanate (PZT) capacitors were built and tested. The devices consist of a monolithic Pt back electrode, ferroelectric PZT film deposited by the solgel method, a patterned Pt top electrode, and a Spin-On-Glass (SOG) passivation layer to protect as well as aid in flip chip bonding. Two commercial SOG solutions are used and compared in this paper, a phosphosilicate and a methylsiloxane. This paper attempts to isolate the effects of the SOG layer and the additional processing steps on the final electrical properties of the FE capacitor. Electrical testing was done by using virtual ground mode, pulsed polarization reversal, to obtain the electrical behavior. The effect of moisture adsorption on the final electrical properties of the ferroelectric capacitors was also investigated. To achieve this end, several experiments were run, isolating the SOG processing steps, comparing the remanent polarization before and after each of the processing steps.

Original languageEnglish
Pages (from-to)121-128
Number of pages8
JournalIntegrated Ferroelectrics
Volume6
Issue number1-4
DOIs
Publication statusPublished - 1995

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ASJC Scopus subject areas

  • Control and Systems Engineering
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Ceramics and Composites
  • Materials Chemistry
  • Electronic, Optical and Magnetic Materials

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