Patterning of periodic high-aspect-ratio nanopores in anatase titanium dioxide from titanium fluoride hydrolysis

Ian D. Tevis, Samuel I. Stupp

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6 Citations (Scopus)

Abstract

We report straight pores in titanium dioxide produced by a pattern transfer method with titanium fluoride hydrolysis. The resulting films on fluorine-doped tin oxide had pores with diameters of 30 nm and depths of 500 nm, corresponding to aspect ratios of 1:17.

Original languageEnglish
Pages (from-to)2162-2165
Number of pages4
JournalNanoscale
Volume3
Issue number5
DOIs
Publication statusPublished - May 1 2011

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ASJC Scopus subject areas

  • Materials Science(all)

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