Abstract
In situ measurement of the plasma used for plasma enhanced chemical vapor deposition (PECVD) growth of carbon nanotubes (CNT) was presented. Neutral species and positive ions extracted from a C 2H 2:NH 3 plasma which were used to grow vertically aligned CNT were anslyzed using mass spectrometry. It was found that NH 3 suppressed C 2H 2 decomposition and encouraged CNT formation. It was demonstrated that the removal of excess carbon, essential for obtaining nanotubes without amorphous carbon deposits, was achieved through gas phase reactions which mainly formed HCN.
| Original language | English |
|---|---|
| Pages (from-to) | 1137-1139 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 85 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - Aug 16 2004 |
Fingerprint
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Plasma composition during plasma-enhanced chemical vapor deposition of carbon nanotubes. / Bell, M. S.; Lacerda, R. G.; Teo, K. B K; Rupesinghe, N. L.; Amaratunga, G. A J; Milne, W. I.; Chhowalla, Manish.
In: Applied Physics Letters, Vol. 85, No. 7, 16.08.2004, p. 1137-1139.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Plasma composition during plasma-enhanced chemical vapor deposition of carbon nanotubes
AU - Bell, M. S.
AU - Lacerda, R. G.
AU - Teo, K. B K
AU - Rupesinghe, N. L.
AU - Amaratunga, G. A J
AU - Milne, W. I.
AU - Chhowalla, Manish
PY - 2004/8/16
Y1 - 2004/8/16
N2 - In situ measurement of the plasma used for plasma enhanced chemical vapor deposition (PECVD) growth of carbon nanotubes (CNT) was presented. Neutral species and positive ions extracted from a C 2H 2:NH 3 plasma which were used to grow vertically aligned CNT were anslyzed using mass spectrometry. It was found that NH 3 suppressed C 2H 2 decomposition and encouraged CNT formation. It was demonstrated that the removal of excess carbon, essential for obtaining nanotubes without amorphous carbon deposits, was achieved through gas phase reactions which mainly formed HCN.
AB - In situ measurement of the plasma used for plasma enhanced chemical vapor deposition (PECVD) growth of carbon nanotubes (CNT) was presented. Neutral species and positive ions extracted from a C 2H 2:NH 3 plasma which were used to grow vertically aligned CNT were anslyzed using mass spectrometry. It was found that NH 3 suppressed C 2H 2 decomposition and encouraged CNT formation. It was demonstrated that the removal of excess carbon, essential for obtaining nanotubes without amorphous carbon deposits, was achieved through gas phase reactions which mainly formed HCN.
UR - http://www.scopus.com/inward/record.url?scp=4444303476&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=4444303476&partnerID=8YFLogxK
U2 - 10.1063/1.1782256
DO - 10.1063/1.1782256
M3 - Article
AN - SCOPUS:4444303476
VL - 85
SP - 1137
EP - 1139
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 7
ER -