Polydentate amines as CVD precursor ancillary ligands. Epitaxial MgO thin-film growth using a highly volatile, thermally and air-stable magnesium precursor

Jason R. Babcock, Douglas D. Benson, Anchuan Wang, Nikki L. Edleman, John A. Belot, Matthew V. Metz, Tobin J Marks

Research output: Contribution to journalArticle

27 Citations (Scopus)
Original languageEnglish
Pages (from-to)180-183
Number of pages4
JournalChemical Vapor Deposition
Issue number4
Publication statusPublished - Aug 2000

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Electrochemistry
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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