Preferential growth of carbon nanotubes/nanofibers using lithographically patterned catalysts

K. B K Teo, Manish Chhowalla, G. A J Amaratunga, W. I. Milne, G. Pirio, P. Legagneux, F. Wycisk, D. Pribat

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

In order to utilise the full potential of carbon nanotubes/nanofibers, it is necessary to be able to synthesize well aligned nanotubes/nanofibres at desired locations on a substrate. This paper examines the preferential growth of aligned carbon nanofibres by PECVD using lithographically patterned catalysts. In the PECVD deposition process, amorphous carbon is deposited together with the nanotubes due to the plasma decomposition of the carbon feed gas, in this case, acetylene. The challenge is to uniformly nucleate nanotudes and reduce the unwanted amorphous carbon on both the patterned and unpatterned areas. An etching gas (ammonia) is thus also incorporated into the PECVD process and by appropriately balancing the acetylene to ammonia ratio, conditions are obtained where no unwanted amorphous carbon is deposited. In this paper, we demonstrate high yield, uniform, 'clean' and preferential growth of vertically aligned nanotubes using PECVD.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsJ Robertson, T Friedmann, D Geohegan, D Luzzi, R Ruoff
Volume675
Publication statusPublished - 2001
EventNanotubes, Fullerenes, Nanostructured and Disordered Carbon - San Francisco, CA, United States
Duration: Apr 17 2001Apr 20 2001

Other

OtherNanotubes, Fullerenes, Nanostructured and Disordered Carbon
CountryUnited States
CitySan Francisco, CA
Period4/17/014/20/01

Fingerprint

Carbon Nanotubes
Plasma enhanced chemical vapor deposition
Nanofibers
Carbon nanotubes
Amorphous carbon
Nanotubes
Acetylene
Catalysts
Ammonia
Gases
Carbon nanofibers
Etching
Carbon
Decomposition
Plasmas
Substrates

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., Pirio, G., Legagneux, P., ... Pribat, D. (2001). Preferential growth of carbon nanotubes/nanofibers using lithographically patterned catalysts. In J. Robertson, T. Friedmann, D. Geohegan, D. Luzzi, & R. Ruoff (Eds.), Materials Research Society Symposium - Proceedings (Vol. 675)

Preferential growth of carbon nanotubes/nanofibers using lithographically patterned catalysts. / Teo, K. B K; Chhowalla, Manish; Amaratunga, G. A J; Milne, W. I.; Pirio, G.; Legagneux, P.; Wycisk, F.; Pribat, D.

Materials Research Society Symposium - Proceedings. ed. / J Robertson; T Friedmann; D Geohegan; D Luzzi; R Ruoff. Vol. 675 2001.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Teo, KBK, Chhowalla, M, Amaratunga, GAJ, Milne, WI, Pirio, G, Legagneux, P, Wycisk, F & Pribat, D 2001, Preferential growth of carbon nanotubes/nanofibers using lithographically patterned catalysts. in J Robertson, T Friedmann, D Geohegan, D Luzzi & R Ruoff (eds), Materials Research Society Symposium - Proceedings. vol. 675, Nanotubes, Fullerenes, Nanostructured and Disordered Carbon, San Francisco, CA, United States, 4/17/01.
Teo KBK, Chhowalla M, Amaratunga GAJ, Milne WI, Pirio G, Legagneux P et al. Preferential growth of carbon nanotubes/nanofibers using lithographically patterned catalysts. In Robertson J, Friedmann T, Geohegan D, Luzzi D, Ruoff R, editors, Materials Research Society Symposium - Proceedings. Vol. 675. 2001
Teo, K. B K ; Chhowalla, Manish ; Amaratunga, G. A J ; Milne, W. I. ; Pirio, G. ; Legagneux, P. ; Wycisk, F. ; Pribat, D. / Preferential growth of carbon nanotubes/nanofibers using lithographically patterned catalysts. Materials Research Society Symposium - Proceedings. editor / J Robertson ; T Friedmann ; D Geohegan ; D Luzzi ; R Ruoff. Vol. 675 2001.
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