Abstract
In order to utilise the full potential of carbon nanotubes/nanofibers, it is necessary to be able to synthesize well aligned nanotubes/nanofibres at desired locations on a substrate. This paper examines the preferential growth of aligned carbon nanofibres by PECVD using lithographically patterned catalysts. In the PECVD deposition process, amorphous carbon is deposited together with the nanotubes due to the plasma decomposition of the carbon feed gas, in this case, acetylene. The challenge is to uniformly nucleate nanotudes and reduce the unwanted amorphous carbon on both the patterned and unpatterned areas. An etching gas (ammonia) is thus also incorporated into the PECVD process and by appropriately balancing the acetylene to ammonia ratio, conditions are obtained where no unwanted amorphous carbon is deposited. In this paper, we demonstrate high yield, uniform, 'clean' and preferential growth of vertically aligned nanotubes using PECVD.
| Original language | English |
|---|---|
| Title of host publication | Materials Research Society Symposium - Proceedings |
| Editors | J Robertson, T Friedmann, D Geohegan, D Luzzi, R Ruoff |
| Volume | 675 |
| Publication status | Published - 2001 |
| Event | Nanotubes, Fullerenes, Nanostructured and Disordered Carbon - San Francisco, CA, United States Duration: Apr 17 2001 → Apr 20 2001 |
Other
| Other | Nanotubes, Fullerenes, Nanostructured and Disordered Carbon |
|---|---|
| Country | United States |
| City | San Francisco, CA |
| Period | 4/17/01 → 4/20/01 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
Cite this
Preferential growth of carbon nanotubes/nanofibers using lithographically patterned catalysts. / Teo, K. B K; Chhowalla, Manish; Amaratunga, G. A J; Milne, W. I.; Pirio, G.; Legagneux, P.; Wycisk, F.; Pribat, D.
Materials Research Society Symposium - Proceedings. ed. / J Robertson; T Friedmann; D Geohegan; D Luzzi; R Ruoff. Vol. 675 2001.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Preferential growth of carbon nanotubes/nanofibers using lithographically patterned catalysts
AU - Teo, K. B K
AU - Chhowalla, Manish
AU - Amaratunga, G. A J
AU - Milne, W. I.
AU - Pirio, G.
AU - Legagneux, P.
AU - Wycisk, F.
AU - Pribat, D.
PY - 2001
Y1 - 2001
N2 - In order to utilise the full potential of carbon nanotubes/nanofibers, it is necessary to be able to synthesize well aligned nanotubes/nanofibres at desired locations on a substrate. This paper examines the preferential growth of aligned carbon nanofibres by PECVD using lithographically patterned catalysts. In the PECVD deposition process, amorphous carbon is deposited together with the nanotubes due to the plasma decomposition of the carbon feed gas, in this case, acetylene. The challenge is to uniformly nucleate nanotudes and reduce the unwanted amorphous carbon on both the patterned and unpatterned areas. An etching gas (ammonia) is thus also incorporated into the PECVD process and by appropriately balancing the acetylene to ammonia ratio, conditions are obtained where no unwanted amorphous carbon is deposited. In this paper, we demonstrate high yield, uniform, 'clean' and preferential growth of vertically aligned nanotubes using PECVD.
AB - In order to utilise the full potential of carbon nanotubes/nanofibers, it is necessary to be able to synthesize well aligned nanotubes/nanofibres at desired locations on a substrate. This paper examines the preferential growth of aligned carbon nanofibres by PECVD using lithographically patterned catalysts. In the PECVD deposition process, amorphous carbon is deposited together with the nanotubes due to the plasma decomposition of the carbon feed gas, in this case, acetylene. The challenge is to uniformly nucleate nanotudes and reduce the unwanted amorphous carbon on both the patterned and unpatterned areas. An etching gas (ammonia) is thus also incorporated into the PECVD process and by appropriately balancing the acetylene to ammonia ratio, conditions are obtained where no unwanted amorphous carbon is deposited. In this paper, we demonstrate high yield, uniform, 'clean' and preferential growth of vertically aligned nanotubes using PECVD.
UR - http://www.scopus.com/inward/record.url?scp=0035559656&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0035559656&partnerID=8YFLogxK
M3 - Conference contribution
VL - 675
BT - Materials Research Society Symposium - Proceedings
A2 - Robertson, J
A2 - Friedmann, T
A2 - Geohegan, D
A2 - Luzzi, D
A2 - Ruoff, R
ER -