TY - JOUR
T1 - Preferential growth of carbon nanotubes/nanofibers using lithographically patterned catalysts
AU - Teo, K. B.K.
AU - Chhowalla, M.
AU - Amaratunga, G. A.J.
AU - Milne, W. I.
AU - Pirio, G.
AU - Legagneux, P.
AU - Wycisk, F.
AU - Pribat, D.
N1 - Funding Information:
This work was funded by the European Commission through the IST-FET project Nanolith and by VA Tech-Reyrolle. K.B.K.T. acknowledges the support from the Association of Commonwealth Universities and British Council.
Copyright:
Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.
PY - 2001
Y1 - 2001
N2 - In order to utilise the full potential of carbon nanotubes/nanofibers, it is necessary to be able to synthesize well aligned nanotubes/nanofibres at desired locations on a substrate. This paper examines the preferential growth of aligned carbon nanofibres by PECVD using lithographically patterned catalysts. In the PECVD deposition process, amorphous carbon is deposited together with the nanotubes due to the plasma decomposition of the carbon feed gas, in this case, acetylene. The challenge is to uniformly nucleate nanotudes and reduce the unwanted amorphous carbon on both the patterned and unpatterned areas. An etching gas (ammonia) is thus also incorporated into the PECVD process and by appropriately balancing the acetylene to ammonia ratio, conditions are obtained where no unwanted amorphous carbon is deposited. In this paper, we demonstrate high yield, uniform, 'clean' and preferential growth of vertically aligned nanotubes using PECVD.
AB - In order to utilise the full potential of carbon nanotubes/nanofibers, it is necessary to be able to synthesize well aligned nanotubes/nanofibres at desired locations on a substrate. This paper examines the preferential growth of aligned carbon nanofibres by PECVD using lithographically patterned catalysts. In the PECVD deposition process, amorphous carbon is deposited together with the nanotubes due to the plasma decomposition of the carbon feed gas, in this case, acetylene. The challenge is to uniformly nucleate nanotudes and reduce the unwanted amorphous carbon on both the patterned and unpatterned areas. An etching gas (ammonia) is thus also incorporated into the PECVD process and by appropriately balancing the acetylene to ammonia ratio, conditions are obtained where no unwanted amorphous carbon is deposited. In this paper, we demonstrate high yield, uniform, 'clean' and preferential growth of vertically aligned nanotubes using PECVD.
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M3 - Conference article
AN - SCOPUS:0035559656
VL - 675
SP - W9.1.1-W9.1.6
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
SN - 0272-9172
T2 - Nanotubes, Fullerenes, Nanostructured and Disordered Carbon
Y2 - 17 April 2001 through 20 April 2001
ER -