Preferential growth of carbon nanotubes/nanofibers using lithographically patterned catalysts

K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, G. Pirio, P. Legagneux, F. Wycisk, D. Pribat

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In order to utilise the full potential of carbon nanotubes/nanofibers, it is necessary to be able to synthesize well aligned nanotubes/nanofibres at desired locations on a substrate. This paper examines the preferential growth of aligned carbon nanofibres by PECVD using lithographically patterned catalysts. In the PECVD deposition process, amorphous carbon is deposited together with the nanotubes due to the plasma decomposition of the carbon feed gas, in this case, acetylene. The challenge is to uniformly nucleate nanotudes and reduce the unwanted amorphous carbon on both the patterned and unpatterned areas. An etching gas (ammonia) is thus also incorporated into the PECVD process and by appropriately balancing the acetylene to ammonia ratio, conditions are obtained where no unwanted amorphous carbon is deposited. In this paper, we demonstrate high yield, uniform, 'clean' and preferential growth of vertically aligned nanotubes using PECVD.

Original languageEnglish
Pages (from-to)W9.1.1-W9.1.6
JournalMaterials Research Society Symposium - Proceedings
Volume675
Publication statusPublished - Jan 1 2001

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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    Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., Pirio, G., Legagneux, P., Wycisk, F., & Pribat, D. (2001). Preferential growth of carbon nanotubes/nanofibers using lithographically patterned catalysts. Materials Research Society Symposium - Proceedings, 675, W9.1.1-W9.1.6.