Preparation of Ba1-xSrxTiO3 thin films by metalorganic chemical vapor deposition and their properties

S. R. Gilbert, B. W. Wessels, D. A. Neumayer, Tobin J Marks, J. L. Schindler, C. R. Kannewurf

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Abstract

Ba1-xSrxTiO3 thin films were deposited over the entire solid solution range by low pressure metal-organic chemical deposition. The metal-organic precursors employed were titanium tetraisopropoxide and barium and strontium(hexafluoroacetylacetonate)2·tetraglyme. The substrates used were LaAlO3 and (100) p-type Si. Ba1-x SrxTiO3 films deposited on LaAlO3 were epitaxial, while the films deposited on Si showed no texture. Auger spectroscopy indicated that single phase Ba-xSrxTiO3 films did not contain detectable levels of fluorine contamination. The dielectric constant was found to depend upon the solid solution composition x, and values as large as 220 measured at a frequency of 1 MHz were obtained. The resistivities of the as-deposited films ranged from 103 to 108 Ω-cm. Temperature dependent resistivity measurements indicated the films were slightly oxygen deficient.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsSeshu B. Desu, David B. Beach, Bruce W. Wessels, Suleyman Gokoglu
PublisherPubl by Materials Research Society
Pages41-46
Number of pages6
Volume335
ISBN (Print)1558992340
Publication statusPublished - 1994
EventProceedings of the 1993 Fall Meeting of the Materials Research Society - Boston, MA, USA
Duration: Nov 29 1993Dec 3 1993

Other

OtherProceedings of the 1993 Fall Meeting of the Materials Research Society
CityBoston, MA, USA
Period11/29/9312/3/93

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Gilbert, S. R., Wessels, B. W., Neumayer, D. A., Marks, T. J., Schindler, J. L., & Kannewurf, C. R. (1994). Preparation of Ba1-xSrxTiO3 thin films by metalorganic chemical vapor deposition and their properties. In S. B. Desu, D. B. Beach, B. W. Wessels, & S. Gokoglu (Eds.), Materials Research Society Symposium Proceedings (Vol. 335, pp. 41-46). Publ by Materials Research Society.