Preparation of Y-Ba-Cu-O thin films on MgO by dc magnetron sputtering from a stoichiometric Y1Ba2Cu3O7-δ target

S. J. Lee, E. D. Rippert, B. Y. Jin, S. N. Song, S. J. Hwu, Kenneth R Poeppelmeier, J. B. Ketterson

Research output: Contribution to journalArticle

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Abstract

Y-Ba-Cu-O thin films have been deposited on MgO substrates by dc magnetron sputtering from a stoichiometric YBa2Cu3O 7-δ target, after which they are subjected to a short heat treatment. Zero resistance is routinely achieved near 60 K, and one film shows zero resistance at 68.0 K.

Original languageEnglish
Pages (from-to)1194-1196
Number of pages3
JournalApplied Physics Letters
Volume51
Issue number15
DOIs
Publication statusPublished - 1987

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magnetron sputtering
preparation
thin films
heat treatment

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Preparation of Y-Ba-Cu-O thin films on MgO by dc magnetron sputtering from a stoichiometric Y1Ba2Cu3O7-δ target. / Lee, S. J.; Rippert, E. D.; Jin, B. Y.; Song, S. N.; Hwu, S. J.; Poeppelmeier, Kenneth R; Ketterson, J. B.

In: Applied Physics Letters, Vol. 51, No. 15, 1987, p. 1194-1196.

Research output: Contribution to journalArticle

Lee, S. J. ; Rippert, E. D. ; Jin, B. Y. ; Song, S. N. ; Hwu, S. J. ; Poeppelmeier, Kenneth R ; Ketterson, J. B. / Preparation of Y-Ba-Cu-O thin films on MgO by dc magnetron sputtering from a stoichiometric Y1Ba2Cu3O7-δ target. In: Applied Physics Letters. 1987 ; Vol. 51, No. 15. pp. 1194-1196.
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