Printed indium gallium zinc oxide transistors. Self-assembled nanodielectric effects on low-temperature combustion growth and carrier mobility

Ken Everaerts, Li Zeng, Jonathan W. Hennek, Diana I. Camacho, Deep Jariwala, Michael J. Bedzyk, Mark C. Hersam, Tobin J. Marks

Research output: Contribution to journalArticle

50 Citations (Scopus)

Abstract

Solution-processed amorphous oxide semiconductors (AOSs) are emerging as important electronic materials for displays and transparent electronics. We report here on the fabrication, microstructure, and performance characteristics of inkjet-printed, low-temperature combustion-processed, amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) grown on solution-processed hafnia self-assembled nanodielectrics (Hf-SANDs). TFT performance for devices processed below 300 C includes >4× enhancement in electron mobility (μFE) on Hf-SAND versus SiO2 or ALD-HfO2 gate dielectrics, while other metrics such as subthreshold swing (SS), current on:off ratio (ION:IOFF), threshold voltage (Vth), and gate leakage current (Ig) are unchanged or enhanced. Thus, low voltage IGZO/SAND TFT operation (<2 V) is possible with ION:IOFF = 107, SS = 125 mV/dec, near-zero Vth, and large electron mobility, μFE(avg) = 20.6 ± 4.3 cm2 V-1 s-1, μ FE(max) = 50 cm2 V-1 s-1. Furthermore, X-ray diffraction analysis indicates that the 300 C IGZO combustion processing leaves the underlying Hf-SAND microstructure and capacitance intact. This work establishes the compatibility and advantages of all-solution, low-temperature fabrication of inkjet-printed, combustion-derived high-mobility IGZO TFTs integrated with self-assembled hybrid organic-inorganic nanodielectrics.

Original languageEnglish
Pages (from-to)11884-11893
Number of pages10
JournalACS Applied Materials and Interfaces
Volume5
Issue number22
DOIs
Publication statusPublished - Nov 27 2013

Keywords

  • amorphous oxide field-effect transistor
  • electron mobility
  • hybrid dielectric
  • inkjet-printing
  • low-voltage electronics
  • thin-film transistor

ASJC Scopus subject areas

  • Materials Science(all)

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