Probing the Chemistry of Alumina Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy

Sicelo S. Masango, Ryan A. Hackler, Anne Isabelle Henry, Michael O. McAnally, George C Schatz, Peter C Stair, Richard P. Van Duyne

Research output: Contribution to journalArticle

18 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy