Properties of multilayer transparent conducting oxide films

E. J.J. Martin, M. Yan, M. Lane, J. Ireland, C. R. Kannewurf, R. P.H. Chang

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86 Citations (Scopus)

Abstract

Multilayered transparent conducting oxide (TCO) film structures have been designed and fabricated to achieve both high conductivity and high transmittance in the visible spectrum. Double-layered TCO structures consisting of Sn-doped CdO and Sn-doped CdIn2O4, Cd-rich Cd2SnO 4, or Ga-doped ZnO are discussed. By optimizing the thickness of the individual layers and the doping levels within those layers, an effective conductivity of 20600 S/cm and an average transmittance larger than 85% in the 400-700 nm range have been achieved for films epitaxially grown on MgO substrates. Bi-layer films consisting of Sn-doped CdO and Ga-doped ZnO have also been deposited on plastic substrates at room temperature with resistivities of ∼1×10-4 Ω cm and an average transmittance of 80-85% in the visible range. These properties are attractive for future TCO applications.

Original languageEnglish
Pages (from-to)309-315
Number of pages7
JournalThin Solid Films
Volume461
Issue number2
DOIs
Publication statusPublished - Aug 16 2004

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Keywords

  • Cadmium
  • Indium tin oxide
  • Laser ablation
  • Zinc oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Martin, E. J. J., Yan, M., Lane, M., Ireland, J., Kannewurf, C. R., & Chang, R. P. H. (2004). Properties of multilayer transparent conducting oxide films. Thin Solid Films, 461(2), 309-315. https://doi.org/10.1016/j.tsf.2004.01.103