Properties of tetrahedral amorphous carbon deposited by a filtered cathodic vacuum arc

M. Chhowalla, C. W. Chen, B. Kleinsorge, J. Robertson, G. A.J. Amaratunga, W. I. Milne

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

The properties of a highly sp3 bonded form of amorphous carbon denoted ta-C deposited from a filtered cathodic vacuum arc (FCVA) are described as a function of ion energy and deposition temperature. The sp3 fraction depends strongly on ion energy and reaches 85% at an ion energy of 100 eV. Other properties such as density and band gap vary in a similar fashion, with the optical gap reaching a maximum of 2.3 eV. These films are very smooth with area roughness of order 1 nm. The sp3 fraction falls suddenly to almost zero for deposition above about 200 °C.

Original languageEnglish
Pages (from-to)299-304
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume423
DOIs
Publication statusPublished - 1996
EventProceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA
Duration: Apr 8 1996Apr 12 1996

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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