Properties of tetrahedral amorphous carbon deposited by a filtered cathodic vacuum arc

Manish Chhowalla, C. W. Chen, B. Kleinsorge, J. Robertson, G. A J Amaratunga, W. I. Milne

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

The properties of a highly sp3 bonded form of amorphous carbon denoted ta-C deposited from a filtered cathodic vacuum arc (FCVA) are described as a function of ion energy and deposition temperature. The sp3 fraction depends strongly on ion energy and reaches 85% at an ion energy of 100 eV. Other properties such as density and band gap vary in a similar fashion, with the optical gap reaching a maximum of 2.3 eV. These films are very smooth with area roughness of order 1 nm. The sp3 fraction falls suddenly to almost zero for deposition above about 200 °C.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages299-304
Number of pages6
Volume423
Publication statusPublished - 1996
EventProceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA
Duration: Apr 8 1996Apr 12 1996

Other

OtherProceedings of the 1996 MRS Spring Symposium
CitySan Francisco, CA, USA
Period4/8/964/12/96

Fingerprint

Amorphous carbon
Vacuum
Ions
Energy gap
Surface roughness
Temperature

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Chhowalla, M., Chen, C. W., Kleinsorge, B., Robertson, J., Amaratunga, G. A. J., & Milne, W. I. (1996). Properties of tetrahedral amorphous carbon deposited by a filtered cathodic vacuum arc. In Materials Research Society Symposium - Proceedings (Vol. 423, pp. 299-304). Materials Research Society.

Properties of tetrahedral amorphous carbon deposited by a filtered cathodic vacuum arc. / Chhowalla, Manish; Chen, C. W.; Kleinsorge, B.; Robertson, J.; Amaratunga, G. A J; Milne, W. I.

Materials Research Society Symposium - Proceedings. Vol. 423 Materials Research Society, 1996. p. 299-304.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chhowalla, M, Chen, CW, Kleinsorge, B, Robertson, J, Amaratunga, GAJ & Milne, WI 1996, Properties of tetrahedral amorphous carbon deposited by a filtered cathodic vacuum arc. in Materials Research Society Symposium - Proceedings. vol. 423, Materials Research Society, pp. 299-304, Proceedings of the 1996 MRS Spring Symposium, San Francisco, CA, USA, 4/8/96.
Chhowalla M, Chen CW, Kleinsorge B, Robertson J, Amaratunga GAJ, Milne WI. Properties of tetrahedral amorphous carbon deposited by a filtered cathodic vacuum arc. In Materials Research Society Symposium - Proceedings. Vol. 423. Materials Research Society. 1996. p. 299-304
Chhowalla, Manish ; Chen, C. W. ; Kleinsorge, B. ; Robertson, J. ; Amaratunga, G. A J ; Milne, W. I. / Properties of tetrahedral amorphous carbon deposited by a filtered cathodic vacuum arc. Materials Research Society Symposium - Proceedings. Vol. 423 Materials Research Society, 1996. pp. 299-304
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