The deposition of highly oriented KTP thin films by pulsed excimer laser ablation (PELA) is demonstrated. The KTP thin films were fabricated on sapphire substrates, or polycrystalline films on silicon substrates at relatively low substrate temperatures. The preferential crystalline orientation was dependent on the substrate temperature and the oxygen partial pressure. The films showed high SHG response with deff comparable to the bulk value of a KTP crystal.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)