Pulsed laser deposition of conductive metallo-dielectric optical filters

R. Lopez, R. Ruiz, R. F. Haglund, L. C. Feldman

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


We describe the fabrication by room-temperature pulsed laser deposition of a transparent conductor comprising alternating layers of silver and aluminum oxide, forming a metallo-dielectric filter. Transmittances of 0.7 over specific wavelength bands were achieved with resistivities as low as 6.0 × 10-6 Ω cm, almost two orders of magnitude lower than that of the best single-substrate thin films, such as indium tin oxide. The resistivity can be predicted without adjustable parameters and designed using a simple parallel-circuit model; the optical properties are well described by standard matrix transmission calculations. This demonstrates that pulsed laser deposition may be used to fabricate prototypes of high-quality transparent conductors with predictable properties for conducting windows where low-temperature deposition is critical, as in organic light-emitting diodes and for non-linear optical films.

Original languageEnglish
Pages (from-to)307-310
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Issue number2
Publication statusPublished - Feb 1 2002

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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