Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: Cor-In 2 - 2xZn xSn xO 3

Cathleen A. Hoel; D. Bruce Buchholz; Robert P.H. Chang; Kenneth R. Poeppelmeier

doi:10.1016/j.tsf.2011.10.012

Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: Cor-In _{2 - 2x}Zn _xSn _xO ₃

Cathleen A. Hoel, D. Bruce Buchholz, Robert P.H. Chang, Kenneth R. Poeppelmeier

Northwestern University

Research output: Contribution to journal › Article

4 Citations (Scopus)

Abstract

Thin films of corundum-type In _{2 - 2x}Zn _xSn _xO ₃ (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO ₃ substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

Original language	English
Pages (from-to)	2938-2942
Number of pages	5
Journal	Thin Solid Films
Volume	520
Issue number	7
DOIs	https://doi.org/10.1016/j.tsf.2011.10.012
Publication status	Published - Jan 31 2012

Keywords

Corundum
Epitaxial
Lattice matched
Pulsed-laser deposition
Transparent conducting oxide
Zinc indium tin oxide

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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Hoel, C. A., Buchholz, D. B., Chang, R. P. H., & Poeppelmeier, K. R. (2012). Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: Cor-In _{2 - 2x}Zn _xSn _xO ₃. Thin Solid Films, 520(7), 2938-2942. https://doi.org/10.1016/j.tsf.2011.10.012

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abstract = "Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.",

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AU - Hoel, Cathleen A.

AU - Buchholz, D. Bruce

AU - Chang, Robert P.H.

AU - Poeppelmeier, Kenneth R.

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N2 - Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

AB - Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

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KW - Lattice matched

KW - Pulsed-laser deposition

KW - Transparent conducting oxide

KW - Zinc indium tin oxide

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