Abstract
Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.
Original language | English |
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Pages (from-to) | 2938-2942 |
Number of pages | 5 |
Journal | Thin Solid Films |
Volume | 520 |
Issue number | 7 |
DOIs | |
Publication status | Published - Jan 31 2012 |
Keywords
- Corundum
- Epitaxial
- Lattice matched
- Pulsed-laser deposition
- Transparent conducting oxide
- Zinc indium tin oxide
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry