Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: Cor-In 2 - 2xZn xSn xO 3

Cathleen A. Hoel; D. Bruce Buchholz; Robert P.H. Chang; Kenneth R. Poeppelmeier

doi:10.1016/j.tsf.2011.10.012

Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: Cor-In _{2 - 2x}Zn _xSn _xO ₃

Cathleen A. Hoel, D. Bruce Buchholz, Robert P.H. Chang, Kenneth R. Poeppelmeier

Northwestern University

Research output: Contribution to journal › Article

4 Citations (Scopus)

Abstract

Thin films of corundum-type In _{2 - 2x}Zn _xSn _xO ₃ (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO ₃ substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

Original language	English
Pages (from-to)	2938-2942
Number of pages	5
Journal	Thin Solid Films
Volume	520
Issue number	7
DOIs	https://doi.org/10.1016/j.tsf.2011.10.012
Publication status	Published - Jan 31 2012

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Keywords

Corundum
Epitaxial
Lattice matched
Pulsed-laser deposition
Transparent conducting oxide
Zinc indium tin oxide

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Cite this

Hoel, C. A., Buchholz, D. B., Chang, R. P. H., & Poeppelmeier, K. R. (2012). Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: Cor-In _{2 - 2x}Zn _xSn _xO ₃. Thin Solid Films, 520(7), 2938-2942. https://doi.org/10.1016/j.tsf.2011.10.012

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N2 - Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

AB - Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

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Access to Document

10.1016/j.tsf.2011.10.012