Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: Cor-In 2 - 2xZn xSn xO 3

Cathleen A. Hoel, D. Bruce Buchholz, Robert P. H. Chang, Kenneth R Poeppelmeier

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

Original languageEnglish
Pages (from-to)2938-2942
Number of pages5
JournalThin Solid Films
Volume520
Issue number7
DOIs
Publication statusPublished - Jan 31 2012

Fingerprint

Corundum
Aluminum Oxide
Pulsed laser deposition
pulsed laser deposition
aluminum oxides
Substrates
Oxides
incidence
Metals
conduction
X ray diffraction
Thin films
conductivity
oxides
thin films
diffraction
metals
Costs
x rays

Keywords

  • Corundum
  • Epitaxial
  • Lattice matched
  • Pulsed-laser deposition
  • Transparent conducting oxide
  • Zinc indium tin oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Pulsed-laser deposition of heteroepitaxial corundum-type ZITO : Cor-In 2 - 2xZn xSn xO 3. / Hoel, Cathleen A.; Buchholz, D. Bruce; Chang, Robert P. H.; Poeppelmeier, Kenneth R.

In: Thin Solid Films, Vol. 520, No. 7, 31.01.2012, p. 2938-2942.

Research output: Contribution to journalArticle

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AB - Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

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