Quantitative analysis of strain relaxation in GexSi 1-x/Si(110) heterostructures and an accurate determination of stacking fault energy in GexSi1-x alloys

R. Hull; J. C. Bean; L. J. Peticolas; D. Bahnck; B. E. Weir; L. C. Feldman

doi:10.1063/1.108068

Quantitative analysis of strain relaxation in Ge_xSi _1-x/Si(110) heterostructures and an accurate determination of stacking fault energy in Ge_xSi_1-x alloys

R. Hull, J. C. Bean, L. J. Peticolas, D. Bahnck, B. E. Weir, L. C. Feldman

Rutgers University

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Abstract

We report a quantitative theoretical and experimental analysis of strain relaxation in Ge_xSi_1-x/Si(110) heterostructures. It is shown that above a critical composition, the critical thickness for edge a/6〈112〉 Shockley partial dislocations is less than that for 60°a/2〈110〉 total dislocations. The net (excess) stress is greater on the edge a/6〈112〉 dislocations for epilayer thicknesses, h<h_x, but greater on the 60°a/2〈110〉 dislocations for h≳h_x. The sensitive calculated dependence of h_x upon the stacking fault energy per unit area γ allows an experimental determination of γ=65±10 mJ m^-2 for x∼0.3 in Ge _xSi_1-x.

Original language	English
Pages (from-to)	2802-2804
Number of pages	3
Journal	Applied Physics Letters
Volume	61
Issue number	23
DOIs	https://doi.org/10.1063/1.108068
Publication status	Published - Dec 1 1992

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ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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Hull, R., Bean, J. C., Peticolas, L. J., Bahnck, D., Weir, B. E., & Feldman, L. C. (1992). Quantitative analysis of strain relaxation in Ge_xSi _1-x/Si(110) heterostructures and an accurate determination of stacking fault energy in Ge_xSi_1-x alloys. Applied Physics Letters, 61(23), 2802-2804. https://doi.org/10.1063/1.108068

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abstract = "We report a quantitative theoretical and experimental analysis of strain relaxation in GexSi1-x/Si(110) heterostructures. It is shown that above a critical composition, the critical thickness for edge a/6〈112〉 Shockley partial dislocations is less than that for 60°a/2〈110〉 total dislocations. The net (excess) stress is greater on the edge a/6〈112〉 dislocations for epilayer thicknesses, hx, but greater on the 60°a/2〈110〉 dislocations for h≳hx. The sensitive calculated dependence of hx upon the stacking fault energy per unit area γ allows an experimental determination of γ=65±10 mJ m-2 for x∼0.3 in Ge xSi1-x.",

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AU - Bean, J. C.

AU - Peticolas, L. J.

AU - Bahnck, D.

AU - Weir, B. E.

AU - Feldman, L. C.

PY - 1992/12/1

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N2 - We report a quantitative theoretical and experimental analysis of strain relaxation in GexSi1-x/Si(110) heterostructures. It is shown that above a critical composition, the critical thickness for edge a/6〈112〉 Shockley partial dislocations is less than that for 60°a/2〈110〉 total dislocations. The net (excess) stress is greater on the edge a/6〈112〉 dislocations for epilayer thicknesses, hx, but greater on the 60°a/2〈110〉 dislocations for h≳hx. The sensitive calculated dependence of hx upon the stacking fault energy per unit area γ allows an experimental determination of γ=65±10 mJ m-2 for x∼0.3 in Ge xSi1-x.

AB - We report a quantitative theoretical and experimental analysis of strain relaxation in GexSi1-x/Si(110) heterostructures. It is shown that above a critical composition, the critical thickness for edge a/6〈112〉 Shockley partial dislocations is less than that for 60°a/2〈110〉 total dislocations. The net (excess) stress is greater on the edge a/6〈112〉 dislocations for epilayer thicknesses, hx, but greater on the 60°a/2〈110〉 dislocations for h≳hx. The sensitive calculated dependence of hx upon the stacking fault energy per unit area γ allows an experimental determination of γ=65±10 mJ m-2 for x∼0.3 in Ge xSi1-x.

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10.1063/1.108068