Raman studies of reactive DC-magnetron sputtered thin films of YBaCuO on MgO

K. C. Sheng, S. J. Lee, Y. H. Shen, X. K. Wang, E. D. Rippert, R. P. Van Duyne, J. B. Ketterson, Robert P. H. Chang

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Raman spectroscopy was employed to study Y-Ba-Cu-O films prepared by multilayer, reactive sputtering from separate Y, Cu, and Ba0.5Cu0.5 targets. A set of films having the composition YxBa2CuyOz with 0.7 <x <1.8 and 2.8 <y <3.5 and critical temperature with zero resistance, Tc(R = 0), ranging from 25 to 90 K was studied. The correlation between Raman data and critical temperature, Tc, was investigated. This technique provides information concerning the film crystallinity, homogeneity, and impurity content (including other phases) which is useful in judging the quality of high Tc superconducting films. The rapid thermal annealing process is an efficient way to reduce chemical reactions between the film and the substrate.

Original languageEnglish
Pages (from-to)1312-1319
Number of pages8
JournalJournal of Materials Research
Volume4
Issue number6
Publication statusPublished - Nov 1989

Fingerprint

direct current
Thin films
thin films
critical temperature
Superconducting films
Rapid thermal annealing
Reactive sputtering
superconducting films
homogeneity
Raman spectroscopy
Chemical reactions
crystallinity
chemical reactions
Multilayers
sputtering
Impurities
impurities
Temperature
annealing
Substrates

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Sheng, K. C., Lee, S. J., Shen, Y. H., Wang, X. K., Rippert, E. D., Van Duyne, R. P., ... Chang, R. P. H. (1989). Raman studies of reactive DC-magnetron sputtered thin films of YBaCuO on MgO. Journal of Materials Research, 4(6), 1312-1319.

Raman studies of reactive DC-magnetron sputtered thin films of YBaCuO on MgO. / Sheng, K. C.; Lee, S. J.; Shen, Y. H.; Wang, X. K.; Rippert, E. D.; Van Duyne, R. P.; Ketterson, J. B.; Chang, Robert P. H.

In: Journal of Materials Research, Vol. 4, No. 6, 11.1989, p. 1312-1319.

Research output: Contribution to journalArticle

Sheng, KC, Lee, SJ, Shen, YH, Wang, XK, Rippert, ED, Van Duyne, RP, Ketterson, JB & Chang, RPH 1989, 'Raman studies of reactive DC-magnetron sputtered thin films of YBaCuO on MgO', Journal of Materials Research, vol. 4, no. 6, pp. 1312-1319.
Sheng KC, Lee SJ, Shen YH, Wang XK, Rippert ED, Van Duyne RP et al. Raman studies of reactive DC-magnetron sputtered thin films of YBaCuO on MgO. Journal of Materials Research. 1989 Nov;4(6):1312-1319.
Sheng, K. C. ; Lee, S. J. ; Shen, Y. H. ; Wang, X. K. ; Rippert, E. D. ; Van Duyne, R. P. ; Ketterson, J. B. ; Chang, Robert P. H. / Raman studies of reactive DC-magnetron sputtered thin films of YBaCuO on MgO. In: Journal of Materials Research. 1989 ; Vol. 4, No. 6. pp. 1312-1319.
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AU - Ketterson, J. B.

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