Raman studies of reactive DC-magnetron sputtered thin films of YBaCuO on MgO

K. C. Sheng, S. J. Lee, Y. H. Shen, X. K. Wang, E. D. Rippert, R. P. Van Duyne, J. B. Ketterson, Robert P. H. Chang

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Abstract

Raman spectroscopy was employed to study Y-Ba-Cu-O films prepared by multilayer, reactive sputtering from separate Y, Cu, and Ba0.5Cu0.5 targets. A set of films having the composition YxBa2CuyOz with 0.7 <x <1.8 and 2.8 <y <3.5 and critical temperature with zero resistance, Tc(R = 0), ranging from 25 to 90 K was studied. The correlation between Raman data and critical temperature, Tc, was investigated. This technique provides information concerning the film crystallinity, homogeneity, and impurity content (including other phases) which is useful in judging the quality of high Tc superconducting films. The rapid thermal annealing process is an efficient way to reduce chemical reactions between the film and the substrate.

Original languageEnglish
Pages (from-to)1312-1319
Number of pages8
JournalJournal of Materials Research
Volume4
Issue number6
Publication statusPublished - Nov 1989

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ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Sheng, K. C., Lee, S. J., Shen, Y. H., Wang, X. K., Rippert, E. D., Van Duyne, R. P., Ketterson, J. B., & Chang, R. P. H. (1989). Raman studies of reactive DC-magnetron sputtered thin films of YBaCuO on MgO. Journal of Materials Research, 4(6), 1312-1319.