Rapid thermal annealing of YBa2Cu3O7-δ films prepared by OMCVD using a highly volatile fluorocarbon-based precusor

J. Zhao, H. O. Marcy, L. M. Tonge, B. W. Wessels, Tobin J Marks, C. R. Kannewurf

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

Single phase YBa2Cu3O7-δ films having zero resistance at 80-86 K have been reproducibly prepared by organometallic chemical vapor deposition followed by post annealing. The fluoride-substituted β-diketonate Ba(fod)2 was used as a Ba precurcor for deposition. A systematic study of the microstructure and the electrical properties of the OMCVD-derived films as a function of annealing times is presented. The grain size, texture, and superconducting transition temperature were found to be significantly improved by rapid thermal annealing. Highly oriented films with c axes perpendicular to the substrate surface and with a well-connected dense grain structure were obtained. This work shows that highly volatile fluorocarbon-based precursor can be used in OMCVD of YBa2Cu3O7-δ films having desirable superconducting properties.

Original languageEnglish
Pages (from-to)710-714
Number of pages5
JournalPhysica C: Superconductivity and its Applications
Volume159
Issue number5
DOIs
Publication statusPublished - Jul 15 1989

Fingerprint

Fluorocarbons
Rapid thermal annealing
fluorocarbons
Metallorganic chemical vapor deposition
metalorganic chemical vapor deposition
annealing
Annealing
Crystal microstructure
Organometallics
Fluorides
Superconducting transition temperature
fluorides
Chemical vapor deposition
Electric properties
textures
Textures
grain size
transition temperature
electrical properties
vapor deposition

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Rapid thermal annealing of YBa2Cu3O7-δ films prepared by OMCVD using a highly volatile fluorocarbon-based precusor. / Zhao, J.; Marcy, H. O.; Tonge, L. M.; Wessels, B. W.; Marks, Tobin J; Kannewurf, C. R.

In: Physica C: Superconductivity and its Applications, Vol. 159, No. 5, 15.07.1989, p. 710-714.

Research output: Contribution to journalArticle

Zhao, J. ; Marcy, H. O. ; Tonge, L. M. ; Wessels, B. W. ; Marks, Tobin J ; Kannewurf, C. R. / Rapid thermal annealing of YBa2Cu3O7-δ films prepared by OMCVD using a highly volatile fluorocarbon-based precusor. In: Physica C: Superconductivity and its Applications. 1989 ; Vol. 159, No. 5. pp. 710-714.
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