Single phase YBa2Cu3O7-δ films having zero resistance at 80-86 K have been reproducibly prepared by organometallic chemical vapor deposition followed by post annealing. The fluoride-substituted β-diketonate Ba(fod)2 was used as a Ba precurcor for deposition. A systematic study of the microstructure and the electrical properties of the OMCVD-derived films as a function of annealing times is presented. The grain size, texture, and superconducting transition temperature were found to be significantly improved by rapid thermal annealing. Highly oriented films with c axes perpendicular to the substrate surface and with a well-connected dense grain structure were obtained. This work shows that highly volatile fluorocarbon-based precursor can be used in OMCVD of YBa2Cu3O7-δ films having desirable superconducting properties.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Energy Engineering and Power Technology
- Electrical and Electronic Engineering