Rapid thermal annealing of YBa2Cu3O7-δ films prepared by OMCVD using a highly volatile fluorocarbon-based precusor

J. Zhao, H. O. Marcy, L. M. Tonge, B. W. Wessels, T. J. Marks, C. R. Kannewurf

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


Single phase YBa2Cu3O7-δ films having zero resistance at 80-86 K have been reproducibly prepared by organometallic chemical vapor deposition followed by post annealing. The fluoride-substituted β-diketonate Ba(fod)2 was used as a Ba precurcor for deposition. A systematic study of the microstructure and the electrical properties of the OMCVD-derived films as a function of annealing times is presented. The grain size, texture, and superconducting transition temperature were found to be significantly improved by rapid thermal annealing. Highly oriented films with c axes perpendicular to the substrate surface and with a well-connected dense grain structure were obtained. This work shows that highly volatile fluorocarbon-based precursor can be used in OMCVD of YBa2Cu3O7-δ films having desirable superconducting properties.

Original languageEnglish
Pages (from-to)710-714
Number of pages5
JournalPhysica C: Superconductivity and its applications
Issue number5
Publication statusPublished - Jul 15 1989

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

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