Reconfiguration and dissociation of bonded hydrogen in silicon by energetic ions

S. V.S. Nageswara Rao, S. K. Dixit, G. Lüpke, N. H. Tolk, L. C. Feldman

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2 Citations (Scopus)


We report in situ infrared measurements of ion-induced reconfiguration and dissociation of bonded hydrogen associated with various defects in silicon at low temperatures. Defect-associated Si-H complexes were prepared by low-temperature proton implantation in silicon followed by room-temperature annealing. As a result of subsequent low-temperature He3 ion irradiation, we observed (1) ion-induced dissociation of Si-H complexes, (2) a notable difference in the dissociation rate of interstitial- and vacancy-type defects, and, unexpectedly, (3) the growth of bond-centered hydrogen, which is generally observed in association with low-temperature proton implantation. These findings provide insight into the mechanisms responsible for the dissociation of hydrogen bonds in silicon and thus have important implications for bond-selective nanoscale engineering and the long-term reliability of state-of-the-art silicon semiconductor and photovoltaic devices.

Original languageEnglish
Article number045204
JournalPhysical Review B - Condensed Matter and Materials Physics
Issue number4
Publication statusPublished - Jan 28 2011

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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