The relationship between electrical and optical properties of indium titanium oxide (ITO) films fabricated by pulsed laser deposition was investigated at different partial pressure using Rutherford backscattering spectroscopy. Results showed that the lowest resistivity of the films was oxygen rich compared to the expected stoichiometric composition value. The electric resistivity was modeled, assuming that only the equilibrated fraction contributed to the low resistivity of the film. The model suggested that still lower resistivity ITO films may be produced with the use of inert buffer gas in addition to oxygen or by different geometry.
ASJC Scopus subject areas
- Physics and Astronomy(all)