Rutherford scattering-channeling analysis of semiconductor interfaces

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The main concepts in ion scattering analysis of interfaces are reviewed and relevant literature is cited.

Original languageEnglish
Pages (from-to)3-6
Number of pages4
JournalThin Solid Films
Volume104
Issue number1-2
DOIs
Publication statusPublished - Jun 17 1983

Fingerprint

ion scattering
Scattering
Ions
Semiconductor materials
scattering

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Rutherford scattering-channeling analysis of semiconductor interfaces. / Feldman, Leonard C.

In: Thin Solid Films, Vol. 104, No. 1-2, 17.06.1983, p. 3-6.

Research output: Contribution to journalArticle

@article{2564f48a82f44a859092eeb135250e28,
title = "Rutherford scattering-channeling analysis of semiconductor interfaces",
abstract = "The main concepts in ion scattering analysis of interfaces are reviewed and relevant literature is cited.",
author = "Feldman, {Leonard C}",
year = "1983",
month = "6",
day = "17",
doi = "10.1016/0040-6090(83)90541-2",
language = "English",
volume = "104",
pages = "3--6",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "1-2",

}

TY - JOUR

T1 - Rutherford scattering-channeling analysis of semiconductor interfaces

AU - Feldman, Leonard C

PY - 1983/6/17

Y1 - 1983/6/17

N2 - The main concepts in ion scattering analysis of interfaces are reviewed and relevant literature is cited.

AB - The main concepts in ion scattering analysis of interfaces are reviewed and relevant literature is cited.

UR - http://www.scopus.com/inward/record.url?scp=0020138652&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020138652&partnerID=8YFLogxK

U2 - 10.1016/0040-6090(83)90541-2

DO - 10.1016/0040-6090(83)90541-2

M3 - Article

AN - SCOPUS:0020138652

VL - 104

SP - 3

EP - 6

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 1-2

ER -