Rutherford scattering-channeling analysis of semiconductor interfaces

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


The main concepts in ion scattering analysis of interfaces are reviewed and relevant literature is cited.

Original languageEnglish
Pages (from-to)3-6
Number of pages4
JournalThin Solid Films
Issue number1-2
Publication statusPublished - Jun 17 1983

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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