Rutherford scattering-channeling analysis of semiconductor interfaces

Leonard C Feldman

doi:10.1016/0040-6090(83)90541-2

Rutherford scattering-channeling analysis of semiconductor interfaces

Leonard C Feldman

Rutgers University

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The main concepts in ion scattering analysis of interfaces are reviewed and relevant literature is cited.

Original language	English
Pages (from-to)	3-6
Number of pages	4
Journal	Thin Solid Films
Volume	104
Issue number	1-2
DOIs	https://doi.org/10.1016/0040-6090(83)90541-2
Publication status	Published - Jun 17 1983

ASJC Scopus subject areas

Surfaces, Coatings and Films
Condensed Matter Physics
Surfaces and Interfaces

Access to Document

10.1016/0040-6090(83)90541-2

Fingerprint Dive into the research topics of 'Rutherford scattering-channeling analysis of semiconductor interfaces'. Together they form a unique fingerprint.

Cite this

@article{2564f48a82f44a859092eeb135250e28,

title = "Rutherford scattering-channeling analysis of semiconductor interfaces",

abstract = "The main concepts in ion scattering analysis of interfaces are reviewed and relevant literature is cited.",

author = "Feldman, {Leonard C}",

year = "1983",

month = jun,

day = "17",

doi = "10.1016/0040-6090(83)90541-2",

language = "English",

volume = "104",

pages = "3--6",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "1-2",

}

TY - JOUR

T1 - Rutherford scattering-channeling analysis of semiconductor interfaces

AU - Feldman, Leonard C

PY - 1983/6/17

Y1 - 1983/6/17

N2 - The main concepts in ion scattering analysis of interfaces are reviewed and relevant literature is cited.

AB - The main concepts in ion scattering analysis of interfaces are reviewed and relevant literature is cited.

UR - http://www.scopus.com/inward/record.url?scp=0020138652&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020138652&partnerID=8YFLogxK

U2 - 10.1016/0040-6090(83)90541-2

DO - 10.1016/0040-6090(83)90541-2

M3 - Article

AN - SCOPUS:0020138652

VL - 104

SP - 3

EP - 6

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 1-2

ER -

Rutherford scattering-channeling analysis of semiconductor interfaces

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Cite this