Abstract
The synthesis of molybdenum oxo-amidinate complexes MoO2(R2AMD)2 [AMD = N,N′-di-R-acetamidinate; R = Cy (2; cyclohexyl) and iPr (3)], and their characterization by 1H, 13C NMR, X-ray diffraction, and thermogravimetric analysis is reported. Quartz-crystal microbalance and X-ray photoelectron spectroscopic studies confirm that 3 is an improved ALD precursor versus the R = t-butyl derivative for MoO3 film growth. Complex 3 is accessible in higher yields (80%+), is easier to handle without mass loss, and in conjunction with O3 as the second ALD reagent, yields nitride-free MoO3 films.
| Original language | English |
|---|---|
| Pages (from-to) | 1172-1178 |
| Number of pages | 7 |
| Journal | Dalton Transactions |
| Volume | 46 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2017 |
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ASJC Scopus subject areas
- Inorganic Chemistry
Cite this
Second-generation hexavalent molybdenum oxo-amidinate precursors for atomic layer deposition. / Jurca, T.; Peters, A. W.; Mouat, A. R.; Farha, O. K.; Hupp, Joseph T; Lohr, T. L.; Delferro, M.; Marks, Tobin J.
In: Dalton Transactions, Vol. 46, No. 4, 2017, p. 1172-1178.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Second-generation hexavalent molybdenum oxo-amidinate precursors for atomic layer deposition
AU - Jurca, T.
AU - Peters, A. W.
AU - Mouat, A. R.
AU - Farha, O. K.
AU - Hupp, Joseph T
AU - Lohr, T. L.
AU - Delferro, M.
AU - Marks, Tobin J
PY - 2017
Y1 - 2017
N2 - The synthesis of molybdenum oxo-amidinate complexes MoO2(R2AMD)2 [AMD = N,N′-di-R-acetamidinate; R = Cy (2; cyclohexyl) and iPr (3)], and their characterization by 1H, 13C NMR, X-ray diffraction, and thermogravimetric analysis is reported. Quartz-crystal microbalance and X-ray photoelectron spectroscopic studies confirm that 3 is an improved ALD precursor versus the R = t-butyl derivative for MoO3 film growth. Complex 3 is accessible in higher yields (80%+), is easier to handle without mass loss, and in conjunction with O3 as the second ALD reagent, yields nitride-free MoO3 films.
AB - The synthesis of molybdenum oxo-amidinate complexes MoO2(R2AMD)2 [AMD = N,N′-di-R-acetamidinate; R = Cy (2; cyclohexyl) and iPr (3)], and their characterization by 1H, 13C NMR, X-ray diffraction, and thermogravimetric analysis is reported. Quartz-crystal microbalance and X-ray photoelectron spectroscopic studies confirm that 3 is an improved ALD precursor versus the R = t-butyl derivative for MoO3 film growth. Complex 3 is accessible in higher yields (80%+), is easier to handle without mass loss, and in conjunction with O3 as the second ALD reagent, yields nitride-free MoO3 films.
UR - http://www.scopus.com/inward/record.url?scp=85010460247&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85010460247&partnerID=8YFLogxK
U2 - 10.1039/c6dt03952a
DO - 10.1039/c6dt03952a
M3 - Article
AN - SCOPUS:85010460247
VL - 46
SP - 1172
EP - 1178
JO - Dalton Transactions
JF - Dalton Transactions
SN - 1477-9226
IS - 4
ER -