Abstract
The synthesis of molybdenum oxo-amidinate complexes MoO2(R2AMD)2 [AMD = N,N′-di-R-acetamidinate; R = Cy (2; cyclohexyl) and iPr (3)], and their characterization by 1H, 13C NMR, X-ray diffraction, and thermogravimetric analysis is reported. Quartz-crystal microbalance and X-ray photoelectron spectroscopic studies confirm that 3 is an improved ALD precursor versus the R = t-butyl derivative for MoO3 film growth. Complex 3 is accessible in higher yields (80%+), is easier to handle without mass loss, and in conjunction with O3 as the second ALD reagent, yields nitride-free MoO3 films.
Original language | English |
---|---|
Pages (from-to) | 1172-1178 |
Number of pages | 7 |
Journal | Dalton Transactions |
Volume | 46 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2017 |
ASJC Scopus subject areas
- Inorganic Chemistry